Edwards A591-10-958 真空泵 PDF资料

1.产 品 资 料 介 绍：

Edwards A591-10-958 是爱德华 iGX100L 系列的一款干式真空泵，在二手设备市场中以翻新或工作正常状态流通。

产品特点

1. 属于 iGX100L 系列干式泵，设计用于半导体和工业真空应用。

2. 采用节能设计，可显著降低公用事业成本。

3. 结构紧凑轻量，便于在设备中安装。

4. 具备低维护特性，减少停机时间和维护成本。

5. 在二手市场中具有一定的流通活跃度。

产品参数

1. 品牌：爱德华（Edwards）。

2. 型号：A591-10-958，对应泵型 iGX100L。

3. 类型：干式真空泵。

4. 配件：随泵附带控制器等组件。

应用领域

1. 半导体制造中的 Load Lock 及传输腔室抽真空。

2. 计量与检测设备的真空配套。

3. 光刻工艺的设备配套。

4. 晶圆厂设备维护中干式泵的替换与备件储备。

5. 二手半导体设备翻新中的关键真空部件更新。

结尾

Edwards A591-10-958（iGX100L）干式泵以节能、低维护和紧凑设计为特点，在半导体设备配套与运维中具有实用价值，也是二手设备市场中值得关注的真空备件型号。

Edwards A591-10-958 真空泵  英文介绍

Edwards A591-10-958 is a dry vacuum pump from the Edwards iGX100L series, circulating in the second-hand equipment market in refurbished or working condition.

Product Features

Belonging to the iGX100L series dry pump, designed for semiconductor and industrial vacuum applications.

Adopting energy-saving design can significantly reduce the cost of public utilities.

Compact and lightweight structure, easy to install in equipment.

Having low maintenance characteristics, reducing downtime and maintenance costs.

Has a certain level of circulation activity in the second-hand market.

Product Parameters

Brand: Edwards.

Model: A591-10-958, corresponding to pump type iGX100L.

Type: Dry vacuum pump.

Accessories: Comes with a controller and other components along with the pump.

Application Areas

Load Lock and Vacuum Transfer Chamber in Semiconductor Manufacturing.

Vacuum matching of measuring and testing equipment.

Equipment matching for photolithography process.

Replacement and spare parts reserve of dry pumps in wafer fab equipment maintenance.

Key vacuum component updates in the refurbishment of second-hand semiconductor equipment.

ending

The Edwards A591-10-958 (iGX100L) dry pump is characterized by energy saving, low maintenance, and compact design, and has practical value in semiconductor equipment matching and operation. It is also a vacuum spare part model worth paying attention to in the second-hand equipment market.

Edwards A591-10-958 真空泵 产品图片

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型号：Edwards A591-10-958 真空泵

质保：一年

成色：全新/二手

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