Edwards NRY0G9000XS 真空泵 PDF资料
Edwards NRY0G9000XS 是爱德华 iGX100L 系列的一款干式真空泵，常用于半导体设备的清洁抽真空。
产品特点
零维护运行，两次大修之间无需预防性维护。
具备以太网连接功能，支持远程监控。
节能高效，相比前代产品节省公用事业成本。
结构紧凑轻量，便于安装。
配备低功耗待机模式，待机功耗极低。
产品参数
品牌：爱德华（Edwards）。
型号：NRY0G9000XS，对应泵型 iGX100L。
抽速峰值：105 m³/h。
极限压力：5.00×10⁻³ mbar。
接口：进气口 ISO63，排气口 NW25，重量约 120 公斤。
应用领域
半导体 Load Lock 及传输腔室的抽真空。
计量与检测设备的真空配套。
光刻工艺的设备配套。
PVD 和刻蚀工艺的真空配套。
晶圆厂干式泵的替换与备件储备。
结尾
Edwards NRY0G9000XS（iGX100L）干式泵以低维护和节能高效的特点，成为半导体清洁工艺中可靠的真空选择，在设备配套与运维中具有实用价值。
Edwards NRY0G9000XS is a dry vacuum pump from the Edwards iGX100L series, commonly used for cleaning and vacuuming semiconductor equipment.
Product Features
Zero maintenance operation, no preventive maintenance is required between two major repairs.
Capable of Ethernet connection and supporting remote monitoring.
Energy saving and efficient, saving utility costs compared to previous generation products.
Compact and lightweight structure, easy to install.
Equipped with low-power standby mode, standby power consumption is extremely low.
Product Parameters
Brand: Edwards.
Model: NRY0G9000XS, corresponding to pump type iGX100L.
Peak pumping speed: 105 m ³/h.
Ultimate pressure: 5.00 × 10 ⁻ ³ mbar.
Interface: Air inlet ISO63, exhaust outlet NW25, weight approximately 120 kilograms.
Application Areas
Vacuum extraction of semiconductor load lock and transmission chamber.
Vacuum matching of measuring and testing equipment.
Equipment matching for photolithography process.
Vacuum matching of PVD and etching processes.
Replacement and spare parts reserve of dry pumps in wafer fabs.
ending
The Edwards NRY0G9000XS (iGX100L) dry pump has become a reliable vacuum choice in semiconductor cleaning processes due to its low maintenance and energy-saving efficiency, and has practical value in equipment matching and operation.
3.其他产品
CI860K01 3BSE032444R1通信接口模块
woodward 2301A 9907-018调速控制器
HIMA X-FAN1803 电源模块
4.其他产品
ICS TRIPLEX T9431 controller module
REF615E-D HBFDACADANB1BNN1XD display
REF615E-E HBFAABAANAA4BNA11E Operation panel
| AMAT 0100-00175 | TRK-5056 | FBM230 PO926GU |
| AMAT 0090-01270 | TXA-7715 | D201291 |
| AMAT 0100-20416 | 930209A0002 | E69F-B12-MS |
| AMAT 0100-09170 | AA5251S | JETMATIC MT DV1.0+RCPU |
| AMAT 0100-03108 | TP3967-1 | A413015 |
| AMAT 0100-09027 | TP-4629-2 | A413000 |
| AMAT 0100-90702 | PRS-1731 | ANB10D-425/CU2N |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
