ASTeX AX3060-14 射频匹配器 PDF资料

1.产 品 资 料 介 绍：

ASTeX AX3060-14 是一款射频匹配器，型号对应 SmartMatch 智能匹配单元，主要用于等离子体刻蚀、去胶等工艺设备中，用于实现射频电源与等离子体负载之间的阻抗匹配，以最大化功率传输并减少反射功率。

产品特点

1. 归属于 SmartMatch 智能匹配系列，具备快速调谐能力，可适应多步工艺中负载的快速变化。

2. 支持多种工艺气体环境下的稳定匹配，包括 O₂、N₂、CF₄、NF₃、NH₃ 等常见刻蚀和去胶气体。

3. 集成智能匹配算法，可实时检测负载变化并进行快速可靠调谐。

4. 与 ASTeX 的微波等离子体系统配套使用，常见于下游等离子体处理设备中。

5. 产品为美国制造，在二手设备市场中以工作正常状态流通。

产品参数

1. 品牌：ASTeX。

2. 型号：AX3060-14，对应 SmartMatch 系列。

3. 类型：射频匹配器。

4. 关联设备：常见于 ULVAC Enviro II 等刻蚀及去胶系统中配套使用。

5. 流通状态：市面上多为二手或翻新备件，物理状态通常良好。

应用领域

1. 半导体晶圆制造中的等离子体刻蚀工艺。

2. 等离子体去胶工艺。

3. 化学下游等离子体处理系统中的阻抗匹配。

4. 二手半导体设备的翻新与关键部件替换。

5. 晶圆厂设备维护与备件库储备。

结尾

ASTeX AX3060-14 射频匹配器是等离子体工艺设备中保障射频功率高效传输的核心组件，其快速匹配能力对于多步工艺的稳定执行至关重要，在设备配套和运维中具有重要价值。

ASTeX AX3060-14 射频匹配器  英文介绍

ASTeX AX3060-14 is an RF matching device, corresponding to the SmartMatch intelligent matching unit. It is mainly used in process equipment such as plasma etching and debonding to achieve impedance matching between RF power supply and plasma load, in order to maximize power transmission and reduce reflected power.

Product Features

Belonging to the SmartMatch intelligent matching series, it has fast tuning capability and can adapt to rapid changes in load in multi-step processes.

Support stable matching in various process gas environments, including common etching and de gluing gases such as O ₂, N ₂, CF ₄, NF ∝, NH ∝, etc.

Integrated intelligent matching algorithm, capable of real-time detection of load changes and fast and reliable tuning.

Used in conjunction with ASTeX's microwave plasma system, commonly found in downstream plasma processing equipment.

The product is manufactured in the United States and is in normal working condition in the second-hand equipment market.

Product Parameters

Brand: ASTeX.

Model: AX3060-14, corresponding to the SmartMatch series.

Type: RF Matcher.

Associated devices: commonly used in ULVAC Enviro II and other etching and debonding systems.

Circulation status: Most of the spare parts on the market are second-hand or refurbished, and their physical condition is usually good.

Application Areas

Plasma etching process in semiconductor wafer manufacturing.

Plasma debonding process.

Impedance matching in downstream plasma treatment systems in chemistry.

Refurbishment and replacement of key components for second-hand semiconductor equipment.

Equipment maintenance and spare parts storage in wafer fabs.

ending

The ASTeX AX3060-14 RF matching device is a core component in plasma process equipment that ensures efficient transmission of RF power. Its fast matching capability is crucial for stable execution of multi-step processes and has important value in equipment matching and operation.

ASTeX AX3060-14 射频匹配器 产品图片

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型号：ASTeX AX3060-14 射频匹配器

质保：一年

成色：全新/二手

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