Edwards NR5150000XS 干式泵 PDF资料
Edwards NR5150000XS 是爱德华 iGX100M 系列的一款干式真空泵，属于半导体行业常用的干式泵型号，在二手设备市场中以翻新或工作正常的状态流通。
产品特点
属于 iXM 系列干式泵，采用节能设计，输入功率可比前代产品减少多达60%。
采用气体阻隔技术和改进的热设计，抗腐蚀性比之前系列提高了四倍。
具有出色的粉尘处理能力，适合多层蚀刻等严苛工艺，有助于延长泵的使用寿命。
结构紧凑轻巧，运行噪音和振动较低，适合洁净车间环境。
提供 XCEDE 技术以增强耐腐蚀性。
产品参数
品牌：爱德华（Edwards）。
型号：NR5150000XS，对应泵型 iGX100M SS。
电源：三相 200-230VAC，50/60Hz。
认证：CE 标志。
流通状态：市面上多为翻新或二手备件。
应用领域
半导体制造工艺中的多层蚀刻等苛刻制程的抽真空。
CVD（化学气相沉积）工艺的真空配套。
半导体设备中干式泵的 OEM 配套与备件替换。
晶圆厂设备维护中真空泵的故障替换与备件储备。
二手半导体设备翻新中的关键真空部件更新。
结尾
Edwards NR5150000XS（iGX100M）干式泵凭借其低能耗、高抗腐蚀性和出色的粉尘处理能力，成为半导体严苛工艺中值得信赖的真空解决方案，在晶圆厂设备配套与运维中具有重要价值。
Edwards NR5150000XS is a dry vacuum pump from the Edwards iGX100M series, which is a commonly used dry pump model in the semiconductor industry. It is circulated in the second-hand equipment market in refurbished or working condition.
Product Features
Belonging to the iXM series dry pump, it adopts energy-saving design and can reduce input power by up to 60% compared to previous generation products.
By adopting gas barrier technology and improved thermal design, the corrosion resistance has increased fourfold compared to the previous series.
It has excellent dust handling capabilities and is suitable for harsh processes such as multi-layer etching, which helps to extend the service life of the pump.
Compact and lightweight structure, low operating noise and vibration, suitable for clean workshop environments.
Provide XCEDE technology to enhance corrosion resistance.
Product Parameters
Brand: Edwards.
Model: NR5150000XS, corresponding to pump type iGX100M SS.
Power supply: three-phase 200-230VAC, 50/60Hz.
Certification: CE mark.
Circulation status: Most of the parts on the market are refurbished or second-hand.
Application Areas
Vacuum pumping for demanding processes such as multi-layer etching in semiconductor manufacturing.
Vacuum matching for CVD (Chemical Vapor Deposition) process.
OEM matching and spare parts replacement of dry pumps in semiconductor equipment.
Replacement of faulty vacuum pumps and reserve of spare parts during equipment maintenance in wafer fabs.
Key vacuum component updates in the refurbishment of second-hand semiconductor equipment.
ending
The Edwards NR5150000XS (iGX100M) dry pump, with its low energy consumption, high corrosion resistance, and excellent dust handling capabilities, has become a reliable vacuum solution for semiconductor harsh processes, and has important value in equipment matching and operation in wafer fabs.
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