SMC INR-495-006 循环式温控器 PDF资料
SMC INR-495-006 是INR-495系列中的一款循环式温控器，属于冷冻式循环液温控装置，用于为半导体工艺设备提供精准稳定的循环液温度控制。
产品特点
采用环保制冷剂CO₂，全球变暖潜值为1，符合未来环保法规要求。
符合SEMI S2、S8、F47标准，满足半导体行业安全与环保规范。
结构紧凑，占地面积小，便于在洁净车间安装。
采用不燃、无毒且不易爆炸的CO₂制冷剂，空运不受限制。
全系列温度稳定性保持在±1.0℃以内，控温精度较高。
产品参数
品牌：SMC。
系列型号：INR-495-006。
类型：冷冻式循环液温控装置（Thermo Chiller）。
设定温度范围：-20至+70℃。
合规标准：符合SEMI S2、S8、F47及环保冷媒法规。
应用领域
半导体刻蚀、沉积等核心工艺设备的精准温控。
晶圆厂各类精密加工与检测设备的循环冷却。
对温度敏感的高精度电子制造流程。
半导体生产设备中OEM温控单元的替换与维护。
需符合严格环保法规的出口型设备配套。
结尾
SMC INR-495-006 循环式温控器在温控精度上满足半导体行业要求，同时通过采用CO₂制冷剂在环保合规与安全设计方面提供了长远保障，是设备配套和维护中具有高价值的关键部件。
SMC INR-495-006 is a circulating temperature controller in the INR-495 series, belonging to the cryogenic circulating liquid temperature control device, used to provide precise and stable circulating liquid temperature control for semiconductor process equipment.
Product Features
Adopting environmentally friendly refrigerant CO ₂ with a global warming potential of 1, it meets the requirements of future environmental regulations.
Complies with SEMI S2, S8, F47 standards and meets safety and environmental regulations in the semiconductor industry.
Compact structure, small footprint, easy to install in clean workshops.
Using non combustible, non-toxic, and non explosive CO ₂ refrigerant, air transportation is not restricted.
The temperature stability of the entire series is maintained within ± 1.0 ℃, and the temperature control accuracy is high.
Product Parameters
Brand: SMC.
Series model: INR-495-006.
Type: Cryogenic Circulating Liquid Temperature Control Device (Thermo Chiller).
Set temperature range: -20 to+70 ℃.
Compliance standards: Complies with SEMI S2, S8, F47 and environmental refrigerant regulations.
Application Areas
Accurate temperature control of core process equipment such as semiconductor etching and deposition.
Circulating cooling of various precision processing and testing equipment in wafer fabs.
High precision electronic manufacturing processes sensitive to temperature.
Replacement and maintenance of OEM temperature control units in semiconductor production equipment.
Export type equipment matching that complies with strict environmental regulations.
ending
The SMC INR-495-006 cyclic thermostat meets the requirements of the semiconductor industry in terms of temperature control accuracy, and provides long-term protection in terms of environmental compliance and safety design by using CO ₂ refrigerant. It is a key component with high value in equipment matching and maintenance.
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