LAM V7668A-131000 单板计算机 PDF资料
LAM V7668A-131000 是泛林半导体设备中采用的一块单板计算机，基于VMEbus总线架构，作为刻蚀机等半导体工艺设备的主控核心。
产品特点
采用VMEbus标准总线，适配半导体设备的工业控制架构。
基于Intel Core 2 Duo T7400处理器，主频2.167GHz。
配备4个千兆以太网口，用于设备通信与数据交换。
无风扇被动散热设计，避免颗粒物污染，适合洁净车间环境。
支持热插拔维护，可在不彻底停机的情况下进行更换。
产品参数
型号：V7668A-131000，对应泛林料号605-109114-00x系列。
架构：6U VME64x单板计算机。
内存：2GB SODIMM加板载内存，共4GB。
存储：1GB或4GB工业级CompactFlash。
扩展：1个PMC扩展插槽。
应用领域
泛林半导体200mm及300mm等离子刻蚀机的主控计算机。
执行工艺配方、实时传感器数据采集与闭环控制。
管理射频电源与气体流量的调控逻辑。
设备与上位控制系统间的通信与数据交换。
二手设备翻新与老旧VME控制系统备件替换。
结尾
LAM V7668A-131000 单板计算机是泛林刻蚀设备控制系统的核心运算平台，凭借其VME总线架构和无风扇工业设计，在半导体产线设备运维和备件替换中具有重要地位
LAM V7668A-131000 is a single board computer used in Panlin Semiconductor equipment, based on the VMEbus architecture, serving as the main control core for semiconductor process equipment such as etching machines.
Product Features
Adopting the VMEbus standard bus to adapt to the industrial control architecture of semiconductor equipment.
Based on Intel Core 2 Duo T7400 processor, with a clock speed of 2.167GHz.
Equipped with 4 Gigabit Ethernet ports for device communication and data exchange.
The fanless passive heat dissipation design avoids particle pollution and is suitable for clean workshop environments.
Supports hot swappable maintenance and can be replaced without complete shutdown.
Product Parameters
Model: V7668A-131000, corresponding to Panlin part number 605-109114-00x series.
Architecture: 6U VME64x single board computer.
Memory: 2GB SODIMM with onboard memory, totaling 4GB.
Storage: 1GB or 4GB industrial grade CompactFlash.
Expansion: 1 PMC expansion slot.
Application Areas
The main control computer for the 200mm and 300mm plasma etching machines of Panlin Semiconductor.
Execute process recipe, real-time sensor data acquisition, and closed-loop control.
Manage the control logic of RF power supply and gas flow.
Communication and data exchange between equipment and upper control system.
Renovation of second-hand equipment and replacement of old VME control system spare parts.
ending
The LAM V7668A-131000 single board computer is the core computing platform of the Panlin etching equipment control system. With its VME bus architecture and fanless industrial design, it plays an important role in the operation and maintenance of semiconductor production line equipment and spare parts replacement
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