AMAT 0010-57289 晶圆旋转转移机器人 PDF资料
AMAT 0010-57289 是应用材料公司(Applied Materials)旗下的一款晶圆旋转转移机器人,主要用于半导体制造产线中300毫米晶圆的高精度搬运与定位,是提升晶圆厂自动化水平和生产效率的核心设备之一。
产品特点
专为300毫米晶圆设计,适配主流半导体产线规格。
采用模块化结构,便于安装维护与系统集成。
具备高精度旋转与转移能力,确保晶圆定位准确稳定。
兼容应用材料公司设备体系,可无缝对接其半导体系统平台。
在二手设备市场保持活跃流通,是设备翻新与备件替换的常用选择。
产品参数
品牌:应用材料(Applied Materials,简称AMAT)。
型号:0010-57289。
适用晶圆尺寸:300毫米(12英寸)。
核心功能:晶圆旋转与转移。
参考配件:包含末端执行器(End Effector)及配套线缆等组件。
应用领域
半导体晶圆厂中的晶圆自动搬运与定位。
300毫米晶圆制程环节的物料周转与上下料操作。
应用于应用材料公司刻蚀、沉积、检测等设备平台的配套自动化系统。
二手半导体设备翻新与性能恢复中的关键部件更新。
晶圆厂设备维护与备件库储备,保障产线连续运转。
结尾
该机器人是300毫米晶圆自动化产线中的关键执行部件,其精度和稳定性直接影响晶圆的流转效率和工艺质量,在设备运维和产能保障中具有重要价值。
AMAT 0010-57289 晶圆旋转转移机器人 英文介绍
AMAT 0010-57289 is a wafer rotation transfer robot under Applied Materials, mainly used for high-precision handling and positioning of 300mm wafers in semiconductor manufacturing production lines. It is one of the core equipment to improve the automation level and production efficiency of wafer fabs.
Product Features
Specially designed for 300mm wafers, compatible with mainstream semiconductor production line specifications.
Adopting a modular structure for easy installation, maintenance, and system integration.
Capable of high-precision rotation and transfer, ensuring accurate and stable wafer positioning.
Compatible with the equipment system of Applied Materials Company, it can seamlessly integrate with its semiconductor system platform.
Maintaining active circulation in the second-hand equipment market is a common choice for equipment refurbishment and spare parts replacement.
Product Parameters
Brand: Applied Materials (AMAT).
Model: 0010-57289.
Applicable wafer size: 300 millimeters (12 inches).
Core function: wafer rotation and transfer.
Reference accessories: including end effectors and supporting cables and other components.
Application Areas
Automated wafer handling and positioning in semiconductor wafer fabs.
Material turnover and loading/unloading operations in the 300mm wafer manufacturing process.
A supporting automation system for equipment platforms such as etching, deposition, and testing used in applied materials companies.
Key component updates in the refurbishment and performance recovery of second-hand semiconductor equipment.
Maintenance of wafer fab equipment and spare parts inventory to ensure continuous operation of the production line.
ending
This robot is a key executing component in the 300mm wafer automation production line, and its accuracy and stability directly affect the wafer flow efficiency and process quality. It has important value in equipment operation and production capacity guarantee.
AMAT 0010-57289 晶圆旋转转移机器人 产品图片

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