AMAT 0190-54600 控制单元涡轮泵 PDF资料
AMAT 0190-54600 控制单元涡轮泵
该型号为应用材料(AMAT)设备中使用的涡轮分子泵控制单元,型号标识为STP CONTROL UNIT,产自日本,用于驱动和控制涡轮分子泵的运行。
产品特点
专用控制器:该产品是涡轮分子泵的配套控制单元,负责泵的启动、运行监控和速度调节。
品牌背景:应用材料是全球领先的半导体设备供应商,该部件专为其设备配套设计。
型号标识:部件号为0190-54600,型号为STP CONTROL UNIT。
工作状态:二手市场标注为测试工作正常,具备持续可靠运行能力。
产地:日本原产。
关键信息
品牌:应用材料(AMAT)。
部件号:0190-54600。
型号:STP CONTROL UNIT。
类型:涡轮分子泵控制器。
产地:日本。
应用领域
半导体晶圆制造设备的真空系统控制。
物理气相沉积(PVD)工艺的真空环境维持。
化学气相沉积(CVD)系统的抽真空控制。
刻蚀(Etch)工艺的排气与压力控制。
应用材料公司各类半导体设备的真空系统配套。
简而言之,AMAT 0190-54600是应用材料设备中使用的涡轮分子泵控制单元,型号STP CONTROL UNIT,用于驱动和控制真空系统的涡轮分子泵,是保障工艺腔室真空环境的关键控制部件
AMAT 0190-54600 Control Unit Turbopump
This model is a turbo molecular pump control unit used in Applied Materials (AMAT) equipment, with the model number STP Control UNIT, produced in Japan, used to drive and control the operation of turbo molecular pumps.
Product Features
Special controller: This product is a supporting control unit for turbo molecular pumps, responsible for pump start-up, operation monitoring, and speed regulation.
Brand background: Applied Materials is a leading global semiconductor equipment supplier, and this component is designed specifically for its equipment.
Model identification: Part number 0190-54600, model STP Control UNIT.
Work status: The second-hand market is marked as testing normal and has the ability to operate continuously and reliably.
Origin: Originating from Japan.
Key information
Brand: Applied Materials (AMAT).
Part number: 0190-54600.
Model: STP Control UNIT.
Type: Turbomolecular Pump Controller.
Origin: Japan.
Application areas
Vacuum system control for semiconductor wafer manufacturing equipment.
Maintaining a vacuum environment for Physical Vapor Deposition (PVD) process.
Vacuum control of chemical vapor deposition (CVD) system.
Exhaust and pressure control of Etch process.
Vacuum system matching for various semiconductor equipment of Applied Materials Company.
In short, AMAT 0190-54600 is a turbo molecular pump control unit used in applied material equipment, model STP Control UNIT, used to drive and control the turbo molecular pump of the vacuum system. It is a key control component to ensure the vacuum environment of the process chamber

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