AE 31550102-044 控制器模块 PDF资料
AE 31550102-044 控制器模块
该型号为Advanced Energy（AE）公司生产的Paramount MF 5002射频发生器，输出功率5kW，工作频率2MHz，对应AMAT部件号0190-53530。
产品特点
中频输出：工作于2MHz，适合特定沉积和刻蚀工艺的等离子体需求。
5kW功率：提供5000W稳定输出，满足中等功率等离子体加工场景。
平台成熟：基于AE Paramount系列开发，注重功率精度和运行可靠性。
耐用设计：适合工业连续运行，具备较长使用寿命。
系统兼容：对应AMAT部件号0190-53530，便于与特定设备集成。
关键信息
品牌：Advanced Energy（AE）。
型号：31550102-044 / Paramount MF 5002。
输出功率：5kW。
工作频率：2MHz。
对应AMAT部件号：0190-53530。
应用领域
半导体等离子体刻蚀工艺。
PVD和PECVD薄膜沉积系统。
工业表面处理与等离子体清洗。
AMAT等半导体设备的配套射频模块。
需要稳定中频功率的研发与生产场景。
简而言之，AE 31550102-044是Paramount MF 5002系列的5kW射频发生器，以2MHz中频稳定输出为核心，适用于半导体等离子体工艺及工业应用场景。
AE 31550102-044 Controller Module
This model is the Paramount MF 5002 RF generator produced by Advanced Energy (AE) company, with an output power of 5kW and a working frequency of 2MHz, corresponding to AMAT part number 0190-53530.
Product Features
Intermediate frequency output: operates at 2MHz, suitable for plasma requirements of specific deposition and etching processes.
5kW power: Provides a stable output of 5000W, meeting the requirements of medium power plasma processing scenarios.
Mature platform: Developed based on the AE Paramount series, emphasizing power accuracy and operational reliability.
Durable design: Suitable for continuous industrial operation and has a long service life.
System compatibility: Corresponding to AMAT part number 0190-53530, easy to integrate with specific devices.
Key information
Brand: Advanced Energy (AE).
Model: 31550102-044/Paramount MF 5002.
Output power: 5kW.
Operating frequency: 2MHz.
Corresponding AMAT part number: 0190-53530.
Application areas
Semiconductor plasma etching process.
PVD and PECVD thin film deposition systems.
Industrial surface treatment and plasma cleaning.
RF modules for semiconductor equipment such as AMAT.
Research and production scenarios that require stable intermediate frequency power.
In short, AE 31550102-044 is a 5kW RF generator from Paramount MF 5002 series, with 2MHz intermediate frequency stable output as its core, suitable for semiconductor plasma processes and industrial applications.
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