MKS GHG5013A-002 射频发生器 PDF资料
MKS GHG5013A-002 射频发生器
该型号为MKS Instruments（万机仪器）生产的GHG-50A射频发生器，输出功率为2750W，工作频率为13.56MHz，符合CE标准。
产品特点
标准频率输出：采用13.56MHz工业标准频率，兼容主流半导体工艺设备的匹配网络和腔体设计。
中等功率输出：2750W输出功率，适用于中等功率需求的等离子体刻蚀、沉积等工艺场景。
固态设计：采用固态放大技术，相比传统电子管方案，具备更高的可靠性和更低的维护需求。
稳定输出：具备良好的输出稳定性，可满足半导体工艺对射频功率的一致性和重复性要求。
标准接口与合规性：配备标准RF输出接口，通过CE认证，适用于全球市场部署。
关键信息
品牌：MKS Instruments（万机仪器）。
型号：GHG5013A-002 / GHG-50A。
射频输出功率：2750W。
工作频率：13.56MHz。
认证状态：CE认证。
应用领域
半导体等离子体刻蚀（Etch）工艺的射频源。
化学气相沉积（CVD）系统的等离子体激发。
物理气相沉积（PVD）工艺的射频溅射供能。
介质刻蚀和导体刻蚀等先进制程工艺。
半导体、平板显示及太阳能领域的等离子体加工设备配套。
简而言之，MKS GHG5013A-002是一款13.56MHz、2750W的固态射频发生器，以标准频率输出和可靠性能为特点，是半导体及泛半导体领域等离子体工艺设备中的关键射频供电部件。
MKS GHG5013A-002 RF Generator
This model is a GHG-50A RF generator produced by MKS Instruments, with an output power of 2750W and a working frequency of 13.56MHz, which meets CE standards.
Product Features
Standard frequency output: Adopting 13.56MHz industrial standard frequency, compatible with matching networks and cavity designs of mainstream semiconductor process equipment.
Medium power output: 2750W output power, suitable for plasma etching, deposition and other process scenarios with medium power requirements.
Solid state design: Using solid-state amplification technology, it has higher reliability and lower maintenance requirements compared to traditional electronic tube solutions.
Stable output: It has good output stability and can meet the consistency and repeatability requirements of semiconductor processes for RF power.
Standard interface and compliance: Equipped with standard RF output interface, CE certified, suitable for global market deployment.
Key information
Brand: MKS Instruments.
Model: GHG 5013A-002/GHG 50A.
RF output power: 2750W.
Operating frequency: 13.56MHz.
Certification status: CE certification.
Application areas
RF source for semiconductor plasma etching (Etch) process.
Plasma excitation in chemical vapor deposition (CVD) systems.
RF sputtering power supply for physical vapor deposition (PVD) process.
Advanced process technologies such as dielectric etching and conductor etching.
Supporting plasma processing equipment in the fields of semiconductors, flat panel displays, and solar energy.
In short, MKS GHG5013A-002 is a 13.56MHz, 2750W solid-state RF generator, characterized by standard frequency output and reliable performance. It is a key RF power supply component in plasma process equipment in the semiconductor and pan semiconductor fields.
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