AE 3152412-223 直流电源模块 PDF资料
AE 3152412-223 直流电源模块
该型号为Advanced Energy（AE）公司生产的MDX Pinnacle系列磁控管直流电源模块，输出功率20kW，广泛应用于半导体工艺设备中。
产品特点
大功率输出：输出功率高达20kW，适用于高能耗的半导体工艺和工业应用。
高效节能：电源转换效率最高可达93%，有效降低运营成本和能耗。
高可靠性设计：内置过压、过热、过流等多重保护功能，确保关键应用场景下的稳定运行。
丰富的控制接口：支持Modbus、以太网、USB以及0-10V、4-20mA、RS-232/485等多种通信协议，便于远程监控与集成。
灵活的冷却方案：提供强制风冷、弹性风扇冷却及液冷版本，适配不同安装环境需求。
关键信息
品牌：Advanced Energy（AE）。
型号：3152412-223 / MDX Pinnacle 20K。
输出功率：20kW。
对应AMAT部件号：0190-24495或0190-08067。
输入规格：三相，~480Y/277V，50/60Hz，28A。
应用领域
物理气相沉积（PVD）工艺的磁控溅射电源。
半导体刻蚀（Etch）设备的直流偏压供电。
化学气相沉积（CVD）系统的加热或等离子体源供电。
应用材料（AMAT）等半导体设备的配套电源模块。
工业镀膜、医疗设备和测试测量系统等高要求场景。
简而言之，AE 3152412-223是Advanced Energy旗下Pinnacle系列的高功率直流电源模块，以20kW输出、高效率和多重保护为核心特点，是半导体PVD、刻蚀等工艺设备中的关键供电部件。
AE 3152412-223 DC power module
This model is the MDX Pinnacle series magnetron DC power module produced by Advanced Energy (AE) company, with an output power of 20kW, widely used in semiconductor process equipment.
Product Features
High power output: With an output power of up to 20kW, it is suitable for high-energy consumption semiconductor processes and industrial applications.
Efficient and energy-saving: The power conversion efficiency can reach up to 93%, effectively reducing operating costs and energy consumption.
High reliability design: Built in multiple protection functions such as overvoltage, overheating, and overcurrent to ensure stable operation in critical application scenarios.
Rich control interfaces: Supports Modbus, Ethernet, USB, as well as multiple communication protocols such as 0-10V, 4-20mA, RS-232/485, making it easy for remote monitoring and integration.
Flexible cooling solutions: providing forced air cooling, flexible fan cooling, and liquid cooling versions to meet different installation environment requirements.
Key information
Brand: Advanced Energy (AE).
Model: 3152412-223/MDX Pinnacle 20K.
Output power: 20kW.
Corresponding AMAT part number: 0190-24495 or 0190-08067.
Input specifications: three-phase,~480Y/277V, 50/60Hz, 28A.
Application areas
Magnetron sputtering power supply for physical vapor deposition (PVD) process.
DC bias power supply for semiconductor etching (Etch) equipment.
Heating or plasma source power supply for chemical vapor deposition (CVD) systems.
Supporting power modules for semiconductor equipment such as Applied Materials (AMAT).
High demand scenarios such as industrial coating, medical equipment, and testing and measurement systems.
In short, AE 3152412-223 is a high-power DC power module from Advanced Energy's Pinnacle series, characterized by a 20kW output, high efficiency, and multiple protections. It is a key power supply component in semiconductor PVD, etching, and other process equipment.
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