Brooks 002-7090-03 大气晶圆机器人 PDF资料

1.产 品 资 料 介 绍：

Brooks 002-7090-03 大气晶圆机器人

该型号为Brooks Automation生产的大气晶圆搬运机器人，属于ATR-8系列，专为半导体设备前端EFEM等大气环境下的晶圆传输场景设计。

产品特点

1. 兼容性强：适配150mm（6英寸）及200mm（8英寸）晶圆。

2. 高速高效：单片晶圆循环搬运节拍≤2.4秒，单小时理论产能可达1500片。

3. 定位精准：采用AC伺服模组，全域重复定位精度稳定在±0.08mm。

4. 洁净设计：满足ISO Class 1洁净室标准，配备防静电碳纤维末端执行器。

5. 智能通讯：兼容SECS/GEM产线上位机交互协议，支持实时运行日志上传。

关键信息

1. 品牌：Brooks Automation。

2. 型号：002-7090-03 / ATR-8。

3. 类型：大气晶圆搬运机器人。

4. 适配晶圆尺寸：150mm - 200mm。

5. 配套控制器：XPTN30R2-1-ES专用伺服控制器。

应用领域

1. 半导体设备前端EFEM的晶圆上下料。

2. 刻蚀、PVD、CVD等工艺设备的晶圆自动化传输。

3. 晶圆检测设备的前端物料搬运。

4. 半导体晶圆制造产线的物料移载与调度。

5. 实验室及研发机构的小批量晶圆处理。

简而言之，Brooks 002-7090-03是高效可靠的大气晶圆搬运机器人，专为半导体产线前端传输需求设计，以高洁净度、高精度和高通量性能为核心特点

Brooks 002-7090-03 大气晶圆机器人  英文介绍

Brooks 002-7090-03 Atmospheric Wafer Robot

This model is an atmospheric wafer handling robot produced by Brooks Automation, belonging to the ATR-8 series, designed specifically for wafer transfer scenarios in atmospheric environments such as front-end EFEM for semiconductor equipment.

Product Features

Strong compatibility: compatible with 150mm (6 inches) and 200mm (8 inches) wafers.

High speed and efficiency: The cycle time for transporting a single wafer is ≤ 2.4 seconds, and the theoretical hourly production capacity can reach 1500 wafers.

Accurate positioning: Using AC servo module, the global repetitive positioning accuracy is stable at ± 0.08mm.

Clean Design: Meets ISO Class 1 cleanroom standards and is equipped with anti-static carbon fiber end effectors.

Intelligent communication: compatible with SECS/GEM production line upper computer interaction protocol, supporting real-time operation log upload.

Key information

Brand: Brooks Automation.

Model: 002-7090-03/ATR-8.

Type: Atmospheric wafer handling robot.

Compatible wafer size: 150mm -200mm.

Supporting controller: XPTN30R2-1-ES dedicated servo controller.

Application areas

Semiconductor equipment front-end EFEM wafer loading and unloading.

Automated wafer transfer using etching, PVD, CVD and other process equipment.

Front end material handling for wafer inspection equipment.

Material transfer and scheduling in semiconductor wafer manufacturing production lines.

Small batch wafer processing in laboratories and research and development institutions.

In short, Brooks 002-7090-03 is an efficient and reliable atmospheric wafer handling robot designed specifically for the front-end transport requirements of semiconductor production lines, with high cleanliness, precision, and high-throughput performance as its core features

Brooks 002-7090-03 大气晶圆机器人 产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：Brooks 002-7090-03 大气晶圆机器人

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货