Comdel FP7526RB 射频电源 PDF资料
Comdel FP7526RB 射频电源
该型号为Comdel公司生产的CB3500系列射频电源,输出功率3500瓦,产自美国。
产品特点
品牌优势:Comdel为美国知名射频电源品牌,在半导体等离子体工艺领域具备成熟技术。
系列归属:属于CB系列射频发生器,该系列在CX系列可靠性基础上进行体积与重量优化,适合批量制造场景。
功率规格:输出功率3500瓦,CB系列覆盖50至5000瓦功率范围。
固态设计:采用固态放大技术,提供精准可重复的功率控制、超稳定输出和低使用成本。
安全合规:CB系列设计符合SEMI F47等行业安全指令要求。
关键信息
品牌:Comdel(美国)。
型号:FP7526RB。
系列:CB3500。
输出功率:3500瓦。
产地:美国。
应用领域
半导体等离子体刻蚀(Etch、RIE)工艺。
感应耦合等离子体(ICP)系统。
射频溅射(RF Sputtering)与镀膜(CVD、PVD)。
平板电极(Parallel Plate)等离子体处理。
工业感应加热和介电加热工艺,及光伏太阳能应用。
简而言之,Comdel FP7526RB是CB3500系列中一款3500瓦的固态射频电源,专为半导体等离子体加工等高要求工业场景设计,以高可靠性和稳定输出为核心特点。
Comdel FP7526RB 射频电源 英文介绍
Comdel FP7526RB RF power supply
This model is the CB3500 series RF power supply produced by Comdel, with an output power of 3500 watts, produced in the United States.
Product Features
Brand advantage: Comdel is a well-known RF power supply brand in the United States, with mature technology in the field of semiconductor plasma technology.
Series affiliation: Belonging to the CB series RF generator, this series optimizes its volume and weight based on the reliability of the CX series, making it suitable for mass manufacturing scenarios.
Power specifications: Output power of 3500 watts, CB series covers a power range of 50 to 5000 watts.
Solid state design: Using solid-state amplification technology, it provides precise and repeatable power control, ultra stable output, and low operating costs.
Safety compliance: The CB series design complies with industry safety directives such as SEMI F47.
Key information
Brand: Comdel (USA).
Model: FP7526RB.
Series: CB3500.
Output power: 3500 watts.
Origin: United States.
Application areas
Semiconductor plasma etching (Etch, RIE) process.
Inductively Coupled Plasma (ICP) system.
RF sputtering and coating (CVD, PVD).
Parallel Plate plasma treatment.
Industrial induction heating and dielectric heating processes, as well as photovoltaic solar energy applications.
In short, Comdel FP7526RB is a 3500 watt solid-state RF power supply in the CB3500 series, designed specifically for high demand industrial scenarios such as semiconductor plasma processing, with high reliability and stable output as its core features.
Comdel FP7526RB 射频电源 产品图片

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