Genesis GHW25Z-08108 电源系统 PDF资料
Genesis GHW25Z-08108 电源系统
该型号是ENI（现为MKS Instruments旗下）生产的GHW-25Z系列13.56MHz射频发生器，属于工业级射频电源系统。
产品特点
工作频率为13.56MHz，符合工业射频标准。
输出功率等级为2.5kW。
属于GHW系列高可靠性射频等离子体发生器。
输入电源支持200/208V三相交流电，50/60Hz。
采用水冷冷却方式，需使用温度不超过35℃的冷却水。
专为半导体制造、等离子体处理等工业应用设计。
市场流通多为功能完好的二手设备。
产品参数
产品型号：GHW25Z-08108（对应GHW-25Z系列）。
品牌：ENI（Genesis Power Systems）。
频率：13.56MHz。
输入电源：200/208V，三相，50/60Hz。
冷却方式：水冷（水温≤35℃）。
结尾：
综上所述，Genesis GHW25Z-08108（GHW-25Z）是一款13.56MHz、2.5kW级的工业射频发生器，作为ENI GHW系列的一员，适用于半导体等离子体处理等工艺场景，是相关设备配套与维护中的成熟电源方案。
Genesis GHW25Z-08108 电源系统 英文介绍
Genesis GHW25Z-08108 Power System
This model is the GHW-25Z series 13.56MHz RF generator produced by ENI (now under MKS Instruments), which belongs to the industrial grade RF power supply system.
Product Features
The working frequency is 13.56MHz, which meets the industrial RF standard.
The output power level is 2.5kW.
Belonging to the GHW series of high reliability RF plasma generators.
The input power supports 200/208V three-phase AC, 50/60Hz.
Adopting water-cooled cooling method, cooling water with a temperature not exceeding 35 ℃ is required.
Specially designed for industrial applications such as semiconductor manufacturing and plasma processing.
The market circulation is mostly second-hand equipment with intact functions.
Product Parameters
Product model: GHW25Z-08108 (corresponding to GHW-25Z series).
Brand: ENI (Genesis Power Systems).
Frequency: 13.56MHz.
Input power supply: 200/208V, three-phase, 50/60Hz.
Cooling method: Water cooling (water temperature ≤ 35 ℃).
ending:
In summary, Genesis GHW25Z-08108 (GHW-25Z) is an industrial RF generator with a frequency of 13.56MHz and a power rating of 2.5kW. As a member of the ENI GHW series, it is suitable for process scenarios such as semiconductor plasma treatment and is a mature power supply solution for related equipment matching and maintenance.
Genesis GHW25Z-08108 电源系统 产品图片
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