Edwards 3620-00219 干式真空泵 PDF资料

1.产 品 资 料 介 绍：

Edwards 3620-00219 干式真空泵

该型号属于Edwards iH系列干式真空泵，是专为半导体等严苛工艺环境设计的第三代干泵，尤其适用于PECVD和LPCVD等存在颗粒及腐蚀性副产物的工艺。

产品特点

1. 采用勾爪式无油泵送设计，确保工艺环境洁净。

2. 泵体工作温度较高（约120°C），有效防止工艺气体冷凝。

3. 专为PECVD、LPCVD等严苛半导体工艺优化，可靠性高。

4. 无预防性维护需求，有助于降低运行成本。

5. 优化的能耗设计，最小化拥有成本。

6. 配备先进的吹扫气体系统，对泵体进行有效保护。

7. 易于与工艺设备集成，具备丰富的板载监控功能。

8. 自20世纪90年代末投产以来，经受了长期市场验证。

产品参数

1. 产品型号：3620-00219（对应iH600系列）。

2. 抽速：约600 m³/h（353 CFM）。

3. 极限真空度：1 mTorr（约1.3×10⁻³ mbar）。

4. 电机功率：3.5 - 6.1 kW。

5. 重量：约415 kg。

结尾：

综上所述，Edwards 3620-00219（iH600）是一款久经市场考验的半导体级干式真空泵，凭借其高温运行设计、耐腐蚀特性及低维护成本，是PECVD、LPCVD等严苛工艺真空解决方案的可靠选择。

Edwards 3620-00219 干式真空泵  英文介绍

Edwards 3620-00219 Dry Vacuum Pump

This model belongs to the Edwards iH series dry vacuum pump, which is the third generation dry pump designed specifically for harsh process environments such as semiconductors. It is particularly suitable for processes such as PECVD and LPCVD that involve particles and corrosive by-products.

Product Features

Adopting a hook and claw type oil-free pumping design to ensure a clean process environment.

The working temperature of the pump body is relatively high (about 120 ° C), effectively preventing process gas condensation.

Specially optimized for rigorous semiconductor processes such as PECVD and LPCVD, with high reliability.

Without the need for preventive maintenance, it helps to reduce operating costs.

Optimized energy consumption design to minimize ownership costs.

Equipped with advanced purging gas system to effectively protect the pump body.

Easy to integrate with process equipment and equipped with rich onboard monitoring functions.

Since its production in the late 1990s, it has undergone long-term market validation.

Product Parameters

Product model: 3620-00219 (corresponding to iH600 series).

Extraction speed: approximately 600 m ³/h (353 CFM).

Ultimate vacuum degree: 1 mTorr (approximately 1.3 × 10 ⁻ ³ mbar).

Motor power: 3.5-6.1 kW.

Weight: Approximately 415 kg.

ending:

In summary, Edwards 3620-00219 (iH600) is a semiconductor grade dry vacuum pump that has been tested in the market. With its high-temperature operation design, corrosion resistance, and low maintenance cost, it is a reliable choice for harsh process vacuum solutions such as PECVD and LPCVD.

Edwards 3620-00219 干式真空泵 产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：Edwards 3620-00219 干式真空泵

质保：一年

成色：全新/二手

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