Kawasaki 3NT520B-A044 晶圆搬运转移机器人 PDF资料

1.产 品 资 料 介 绍：

Kawasaki 3NT520B-A044 晶圆搬运转移机器人

该型号是川崎重工（KAWASAKI）为半导体制造设计的专用晶圆搬运机器人，适配8英寸晶圆自动化传输场景，在半导体Fab产线中负责晶圆在各工艺机台间的精准转移。

产品特点

1. 专为半导体制造设计，适配8英寸晶圆的自动化传输。

2. 采用多轴伺服驱动结构，标准重复定位精度可达±0.02mm。

3. 洁净等级适配Class 100超净车间，有效规避晶圆微尘污染。

4. 搭载自主闭环伺服控制系统，搬运抖动量控制在0.01mm以内。

5. 支持全自动时序联动，兼容刻蚀机、薄膜沉积设备等半导体工艺机台。

6. 日本制造，工艺品质可靠。

7. 市场流通多为功能完好的二手设备。

产品参数

1. 产品型号：3NT520B-A044。

2. 品牌：Kawasaki（川崎重工）。

3. 适配晶圆：8英寸。

4. 重复定位精度：±0.02mm。

5. 洁净等级：Class 100超净车间。

结尾：

综上所述，Kawasaki 3NT520B-A044 是一款为半导体8英寸晶圆产线量身定制的精密搬运机器人，凭借高精度定位、洁净室适配能力和稳定的闭环控制性能，是晶圆在各工艺环节间高效、安全转移的可靠保障

Kawasaki 3NT520B-A044 晶圆搬运转移机器人  英文介绍

Kawasaki 3NT520B-A044 wafer handling and transfer robot

This model is a specialized wafer handling robot designed by Kawasaki Heavy Industries (KAWASAKI) for semiconductor manufacturing, suitable for 8-inch wafer automated transfer scenarios, responsible for precise transfer of wafers between various process machines in semiconductor Fab production lines.

Product Features

Specially designed for semiconductor manufacturing, suitable for automated transfer of 8-inch wafers.

Adopting a multi axis servo drive structure, the standard repetitive positioning accuracy can reach ± 0.02mm.

The cleanliness level is suitable for Class 100 ultra clean workshops, effectively avoiding wafer dust pollution.

Equipped with an autonomous closed-loop servo control system, the handling vibration is controlled within 0.01mm.

Support fully automatic timing linkage, compatible with semiconductor process machines such as etching machines and thin film deposition equipment.

Made in Japan, with reliable craftsmanship and quality.

The market circulation is mostly second-hand equipment with intact functions.

Product Parameters

Product model: 3NT520B-A044.

Brand: Kawasaki (Kawasaki Heavy Industries).

Compatible wafer: 8 inches.

Repetitive positioning accuracy: ± 0.02mm.

Cleanliness level: Class 100 ultra clean workshop.

ending:

In summary, Kawasaki 3NT520B-A044 is a precision handling robot tailored for semiconductor 8-inch wafer production lines. With high-precision positioning, cleanroom adaptability, and stable closed-loop control performance, it is a reliable guarantee for efficient and safe transfer of wafers between various process links

Kawasaki 3NT520B-A044 晶圆搬运转移机器人 产品图片

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：Kawasaki 3NT520B-A044 晶圆搬运转移机器人

质保：一年

成色：全新/二手

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