Leybold 400035V0001 数字磁力驱动器 PDF资料
Leybold 400035V0001 数字磁力驱动器
该型号是Leybold(莱宝)生产的MAG.DRIVE digital系列磁悬浮涡轮分子泵控制器,主要与Leybold MAG系列磁悬浮涡轮分子泵配套使用,是驱动和控制泵运转的核心组件。
产品特点
专为Leybold MAG系列磁悬浮涡轮分子泵设计,提供驱动与控制功能。
采用主动式5轴磁轴承系统,实现无接触、无磨损运行。
集成变频器,将单相电源转换为驱动电机所需的三相直流电压。
内置温度管理系统,可选配TMS功能以应对中高腐蚀性工艺。
支持转速设定、温度监控及预警/故障显示等多种功能。
配备多种通信接口选项,包括RS232 C和Profibus等,便于与上位系统集成。
可选配插入式显示模块,实现本地操作与监控。
兼容TURBOVAC MAG系列多款泵型(W 830/1300 C、W 1500 CT、W 2000 C/CT、W 2200 C/CT及W 2800/3200 C/CT等)。
采用19英寸机架式安装设计,重量约10kg。
适用于半导体刻蚀、CVD、PVD及离子注入等关键工艺的真空环境。
产品参数
产品型号:400035V0001,对应型号MAG.DRIVE digital。
品牌:Leybold(莱宝),德国制造。
输入电源:200-240V,50/60Hz。
最大输出电流:20A。
配套料号:AMAT 3620-00190。
结尾:
综上所述,Leybold 400035V0001(MAG.DRIVE digital)作为磁悬浮涡轮分子泵控制器,凭借其可靠的磁轴承驱动技术、灵活的通信接口和广泛的泵型兼容性,是半导体等高要求真空工艺中不可或缺的核心控制组件。
Leybold 400035V0001 数字磁力驱动器 英文介绍
Leybold 400035V0001 Digital Magnetic Drive
This model is the MAG.DRIVE digital series magnetic levitation turbo molecular pump controller produced by Leybold. It is mainly used in conjunction with the Leybold MAG series magnetic levitation turbo molecular pump and is the core component for driving and controlling pump operation.
Product Features
Specially designed for Leybold MAG series magnetic levitation turbo molecular pumps, providing driving and control functions.
Adopting an active 5-axis magnetic bearing system to achieve contactless and wear free operation.
Integrated frequency converter converts single-phase power into three-phase DC voltage required to drive the motor.
Built in temperature management system, optional TMS function to cope with medium to high corrosive processes.
Support multiple functions such as speed setting, temperature monitoring, and warning/fault display.
Equipped with multiple communication interface options, including RS232 C and Profibus, for easy integration with the upper system.
Optional plug-in display module for local operation and monitoring.
Compatible with multiple pump types in the TURBOVAC MAG series (W 830/1300 C, W 1500 CT, W 2000 C/CT, W 2200 C/CT, and W 2800/3200 C/CT, etc.).
Adopting a 19 inch rack mounted design, weighing approximately 10kg.
Suitable for vacuum environments in key processes such as semiconductor etching, CVD, PVD, and ion implantation.
Product Parameters
Product model: 400035V0001, corresponding to MAG.DRIVE digital.
Brand: Leybold, made in Germany.
Input power supply: 200-240V, 50/60Hz.
Maximum output current: 20A.
Supporting part number: AMAT 3620-00190.
ending:
In summary, Leybold 400035V0001 (MAG. DRIVE digital), as a magnetic levitation turbo molecular pump controller, is an indispensable core control component in high demand vacuum processes such as semiconductors due to its reliable magnetic bearing drive technology, flexible communication interface, and extensive pump compatibility.
Leybold 400035V0001 数字磁力驱动器 产品图片

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