CTI-Cryogenics 8185071G001R 低温泵 PDF资料
CTI-Cryogenics 8185071G001R 低温泵
该型号是CTI-Cryogenics（现属Edwards）生产的On-Board系列高真空低温泵，适用于半导体制造及各类超高真空工艺。
产品特点
采用低温冷表面捕获分子，无运动部件，无油污染。
配备Fast Regen™技术，延长再生周期。
支持低温泵联网，实现同时再生。
内置嵌入式微处理器，具备诊断与通信功能。
配套先进软件及图形界面，操作体验良好。
对水蒸气和氢气抽除效率高，提升工艺一致性。
可搭配8200、9600、9700A及IS系列等多种压缩机。
显著提升涡轮泵的水蒸气抽速。
运行能耗和冷却水消耗较低。
占地面积小，兼容现有氦气系统。
产品参数
品牌：CTI-Cryogenics（Edwards旗下）。
产品系列：On-Board系列。
适用行业：半导体、平板显示、光学制造及研发。
应用场景：超高真空、水蒸气抽除、闭环制冷系统。
配套压缩机：8200、9600、9700A、IS-1000、IS-2000V等。
结尾：
综上所述，CTI-Cryogenics 8185071G001R 以其清洁无油、智能控制和高抽速的特点，是半导体等高端应用领域可靠的超高真空解决方案。
CTI-Cryogenics 8185071G001R 低温泵 英文介绍
CTI Kryogenics 8185071G001R Low Temperature Pump
This model is an On Board series high vacuum low-temperature pump produced by CTI Kryogenics (now Edwards), suitable for semiconductor manufacturing and various ultra-high vacuum processes.
Product Features
Using low-temperature cold surface to capture molecules, with no moving parts and no oil pollution.
Equipped with Fast Regen ™ Technology extends the regeneration cycle.
Support networking of low-temperature pumps to achieve simultaneous regeneration.
Built in embedded microprocessor with diagnostic and communication functions.
Equipped with advanced software and graphical interface, the user experience is excellent.
High efficiency in extracting water vapor and hydrogen, improving process consistency.
Can be paired with various compressors such as 8200, 9600, 9700A, and IS series.
Significantly improve the water vapor pumping speed of the turbo pump.
Low operating energy consumption and cooling water consumption.
Small footprint, compatible with existing helium systems.
Product Parameters
Brand: CTI Kryogenics (owned by Edwards).
Product series: On Board series.
Applicable industries: semiconductor, flat panel display, optical manufacturing and research and development.
Application scenarios: ultra-high vacuum, water vapor extraction, closed-loop refrigeration system.
Supporting compressors: 8200, 9600, 9700A, IS-1000, IS-2000V, etc.
ending:
In summary, CTI Kryogenics 8185071G001R is a reliable ultra-high vacuum solution for high-end applications such as semiconductors due to its clean, oil-free, intelligent control, and high pumping speed.
CTI-Cryogenics 8185071G001R 低温泵 产品图片
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