Edwards A53351945XS 干式泵 PDF资料
Edwards A53351945XS 干式泵
该型号对应Edwards iH 600系列干式螺杆真空泵，适用于半导体等严苛工业工艺环境。
产品特点
采用干式螺杆技术，运行无油，确保工艺洁净。
抽速约600 m³/h，可满足大流量抽气需求。
极限真空度可达≤0.01 mbar。
水蒸气耐受能力约30,000 g/h，适合含湿量较高的工艺。
采用坚固的工业级构造，适合长期连续运行。
符合半导体行业严苛的洁净与可靠性要求。
支持标准工业电源（208V，50/60Hz）。
泵体标识明确标注无铜材质，适配特定工艺要求。
市场流通多为功能完好的二手设备。
产品参数
产品型号：A53351945XS（对应iH 600）。
品牌：Edwards（BOC Edwards）。
泵类型：干式螺杆真空泵。
抽速：约600 m³/h。
极限真空：≤0.01 mbar。
结尾：
综上所述，Edwards A53351945XS（iH 600）是一款高抽速、高极限真空的干式螺杆泵，凭借其无油洁净的运行特性和针对半导体工艺的优化设计，是严苛工业应用中可靠的真空获取方案。
Edwards A53351945XS dry pump
This model corresponds to the Edwards iH 600 series dry screw vacuum pump, suitable for harsh industrial process environments such as semiconductors.
Product Features
Adopting dry screw technology, the operation is oil-free, ensuring a clean process.
The pumping speed is about 600 m ³/h, which can meet the demand for high flow pumping.
The ultimate vacuum degree can reach ≤ 0.01 mbar.
The water vapor tolerance is about 30000 g/h, suitable for processes with high moisture content.
Adopting a sturdy industrial grade construction, suitable for long-term continuous operation.
Meets the stringent cleanliness and reliability requirements of the semiconductor industry.
Supports standard industrial power supply (208V, 50/60Hz).
The pump body is clearly marked with no copper material and is suitable for specific process requirements.
The market circulation is mostly second-hand equipment with intact functions.
Product Parameters
Product model: A53351945XS (corresponding to iH 600).
Brand: Edwards (BOC Edwards).
Pump type: Dry screw vacuum pump.
Extraction speed: approximately 600 m ³/h.
Ultimate vacuum: ≤ 0.01 mbar.
ending:
In summary, Edwards A53351945XS (iH 600) is a dry screw pump with high pumping speed and high ultimate vacuum. With its oil-free and clean operating characteristics and optimized design for semiconductor processes, it is a reliable vacuum acquisition solution for harsh industrial applications.
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