GENESIS 27-406204-00 射频发生器 PDF资料
1.产 品 资 料 介 绍：
GENESIS 27-406204-00 射频发生器
该型号对应ENI（现MKS旗下）GHW-50A系列，是专为Novellus半导体设备配套的高功率射频发生器。
产品特点
大功率输出，提供5000W @ 13.56MHz的稳定射频功率。
可连续承受任意阻抗失配条件而不损坏。
具备过温、过流、输入过压等多重安全保护。
配备射频输出互锁与控制I/O互锁，保障操作安全。
符合CE安全及电磁兼容标准。
结构坚固耐用，适合苛刻的制造环境。
电磁兼容性好，减少对周边设备的射频干扰。
采用标准机架式设计，便于安装集成。
专为Novellus系统优化，匹配度高。
采用数字控制技术，具备内部状态诊断功能。
产品参数
输出功率：5000W @ 13.56MHz。
品牌/型号：ENI（MKS Instruments）/ GHW-50A。
适用设备：Novellus半导体设备专用备件。
安全认证：CE认证。
保护功能：过温、过流、失配、输入过压及硬件互锁。
结尾：
综上所述，GENESIS 27-406204-00 是一款高功率、高可靠性的13.56MHz射频发生器，凭借其完善的保护机制和与Novellus系统的深度适配，成为半导体等离子体工艺产线中不可或缺的关键电源组件
GENESIS 27-406204-00 射频发生器 英文介绍
GENESIS 27-406204-00 RF Generator
This model corresponds to the ENI (now under MKS) GHW-50A series, which is a high-power RF generator designed specifically for Novellus semiconductor equipment.
Product Features
High power output, providing stable RF power of 5000W @ 13.56MHz.
Can continuously withstand any impedance mismatch condition without damage.
Equipped with multiple safety protections such as overheating, overcurrent, and input overvoltage.
Equipped with RF output interlock and control I/O interlock to ensure operational safety.
Compliant with CE safety and electromagnetic compatibility standards.
The structure is sturdy and durable, suitable for harsh manufacturing environments.
Good electromagnetic compatibility, reducing RF interference to peripheral devices.
Adopting a standard rack mounted design for easy installation and integration.
Specially optimized for Novellus systems with high compatibility.
Adopting digital control technology, it has internal status diagnosis function.
Product Parameters
Output power: 5000W @ 13.56MHz.
Brand/Model: ENI (MKS Instruments)/GHW-50A.
Applicable equipment: specialized spare parts for Novellus semiconductor equipment.
Safety certification: CE certification.
Protection functions: overheating, overcurrent, mismatch, input overvoltage, and hardware interlock.
ending:
In summary, GENESIS 27-406204-00 is a high-power and highly reliable 13.56MHz RF generator. With its comprehensive protection mechanism and deep compatibility with Novellus systems, it has become an indispensable key power component in semiconductor plasma process production lines
GENESIS 27-406204-00 射频发生器 产品图片
3.其他产品
REF610C11HCNN01 综保继电器
YOKOGAWA SAI143-H63 模拟输出模块
AB 1769-L30ERM 以太网模块
4.其他产品
5X00481G01 analog output module
5X00594G01 analog output module
IC698CHS017B Combustion engine framework
| GE RTT Desktop Test Set | 531X133PRUAKG1 | F31X307LTBAJG1 |
| FM821 | 531X133PRUAJG1 | F31X307LTBAAG1 |
| FM820 | 531X133PRUAGG1 | F31X306LCCABG1 |
| FM803 | 531X133PRUAFG1 | F31X305NTBAPG1 |
| FM802 | 531X133PRUABG1 | F31X305NTBANG1 |
| FM801 | 531X133PRUAAG1 | F31X304IBDAMG1 |
| FAS-113DG | 531X133PROAG1 | F31X300CCHALG2 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
