1.产 品 资 料 介 绍:
TMP-H3603LMC-A1 涡轮分子泵是 Osaka Vacuum(大阪真空)为大流量、高压缩比应用场景开发的一款磁悬浮涡轮分子泵型号。该产品适用于对洁净真空和高抽速有严苛要求的工业与科研领域。
一、产品应用领域(10条)
半导体物理气相沉积
半导体化学气相沉积
半导体刻蚀工艺
平板显示器制造
太阳能电池镀膜
光学镀膜
科研实验高真空系统
粒子加速器
空间环境模拟
分析仪器(质谱仪等)
二、核心产品参数(5条)
产品型号:TMP-H3603LMC-A1
品牌:Osaka Vacuum(大阪真空)
轴承类型:磁悬浮
适用场景:大流量高压缩比
产品状态:该型号目前多作为二手备件在市场流通
结尾: 综上所述,TMP-H3603LMC-A1 作为大阪真空的磁悬浮涡轮分子泵型号,在大流量、高压缩比的应用场景中,为半导体镀膜及科研等领域提供了洁净的高真空环境
TMP-H3603LMC-A1 turbomolecular pump is a magnetic levitation turbomolecular pump model developed by Osaka Vacuum for high flow and high compression ratio application scenarios. This product is suitable for industrial and scientific research fields that have strict requirements for clean vacuum and high pumping speed.
1、 Product application areas (10 items)
Semiconductor Physical Vapor Deposition
Semiconductor Chemical Vapor Deposition
Semiconductor etching process
Flat panel display manufacturing
Solar cell coating
Optical Coating
High vacuum system for scientific research experiments
particle accelerator
Space environment simulation
Analytical instruments (such as mass spectrometers)
2、 Core product parameters (5 items)
Product Model: TMP-H3603LMC-A1
Brand: Osaka Vacuum
Bearing type: magnetic levitation
Applicable scenarios: high traffic and high compression ratio
Product status: This model is currently mostly circulated in the market as a second-hand spare part
Conclusion: In summary, TMP-H3603LMC-A1, as the magnetic levitation turbo molecular pump model of Osaka Vacuum, provides a clean high vacuum environment for semiconductor coating and scientific research in high flow and high compression ratio application scenarios

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SD-98762 101-098762-001 processor
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| IC3600QSPA103A122A | 531X191RTBAHG1 | IC3600EPSW1E1B |
| IC3600QSPA103A103A | 531X191RTBAGG1 | IC3600EPSW1E1 |
| IC3600QPSA122B103B | 531X191RTBAFG4 | IC3600EPSW1C |
| IC3600QOXC7 | 531X191RTBAFG3 | IC3600EPSW1 |
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