MKS 0920-00057 等离子电源模块 PDF资料 

1.产 品 资 料 介 绍：

MKS 0920-00057 是 ASTRONex 系列射频等离子电源模块，料号对应 FI80131。这款模块专为应用材料（AMAT）机台配套设计，负责在工艺腔室外部生成高密度等离子体，再将活性气体输送至反应区域，属于典型的远程等离子体源（RPS）方案。

一、产品应用领域（10条）

1. 半导体氧化硅/氮化硅刻蚀工艺

2. 半导体金属层（Al、TiN）刻蚀后残渣清理

3. 半导体 PECVD 腔室聚合物清除

4. 半导体 SACVD 腔室副产物清理

5. 晶圆表面光刻胶灰化剥离

6. 晶圆去胶后有机残留物去除

7. 晶圆表面自然氧化层还原处理

8. 晶圆键合前表面活化

9. 半导体腔室石墨基座定期清洁

10. 半导体工艺腔室沉积膜层清除保养

二、核心产品参数（5条）

1. 产品归属：MKS ASTRONex 系列

2. 完整型号：FI80131（板号 0920-00057）

3. 配套机台：应用材料（AMAT）半导体设备

4. 供电要求：三相 200/208 VAC，50/60 Hz

5. 安全认证：CE

结尾： 总的来说，0920-00057（FI80131）是 AMAT 机台 RPS 系统的核心供电与激发单元，直接关系腔室清洁效率和晶圆处理质量。由于该模块早已不在产线新机供货清单中，市面上能见到的几乎都是拆机件，入手前务必实测输出功率和气体离解效果，以免影响工艺良率。

MKS 0920-00057 等离子电源模块  英文介绍

MKS 0920-00057 is an ASTRONex series RF plasma power module, corresponding to part number FI80131. This module is designed specifically for application materials (AMAT) machines, responsible for generating high-density plasma outside the process chamber and delivering the active gas to the reaction zone. It is a typical remote plasma source (RPS) solution.

1、 Product application areas (10 items)

Semiconductor Silicon Oxide/Silicon Nitride Etching Process

Cleaning of residues after etching of semiconductor metal layers (Al, TiN)

Semiconductor PECVD chamber polymer removal

Cleaning of by-products in semiconductor SACVD chamber

Wafer surface photoresist ashing and peeling

Removal of organic residues after wafer debonding

Reduction treatment of natural oxide layer on wafer surface

Surface activation before wafer bonding

Regular cleaning of semiconductor chamber graphite base

Cleaning and maintenance of deposited film layer in semiconductor process chamber

2、 Core product parameters (5 items)

Product ownership: MKS ASTRONIX series

Complete model: FI80131 (board number 0920-00057)

Supporting equipment: Applied Materials (AMAT) semiconductor equipment

Power supply requirements: Three phase 200/208 VAC, 50/60 Hz

Safety certification: CE

Conclusion: Overall, 0920-00057 (FI80131) is the core power supply and excitation unit of the AMAT machine RPS system, directly related to chamber cleaning efficiency and wafer processing quality. As this module is no longer on the supply list for new machines on the production line, almost all the parts available on the market are disassembled. Before purchasing, it is necessary to test the output power and gas dissociation effect to avoid affecting the process yield.

MKS 0920-00057 等离子电源模块 产品图片

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型号：MKS 0920-00057 等离子电源模块

质保：一年

成色：全新/二手

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