MKS FI20620-1 远程等离子源 PDF资料 

1.产 品 资 料 介 绍：

MKS FI20620-1 远程等离子源（RPS）是 MKS ASTRON 2L 系列中的一款射频等离子电源。该产品采用远程等离子体源（RPS）设计，将等离子体生成区与工艺腔分离，有效避免电极污染与金属溅射，专为半导体晶圆制造中的高精度、高通量处理工艺而开发。

一、产品应用领域（10条）

1. 半导体晶圆刻蚀工艺

2. 半导体化学气相沉积（CVD）

3. 半导体物理气相沉积（PVD）

4. 半导体晶圆干法清洗

5. 光刻胶去除（去胶工艺）

6. 晶圆表面活化处理

7. 半导体 ALD/ALE 腔室清洁

8. 平板显示器（FPD）面板制造

9. LED 芯片制造

10. 光伏电池板制造

二、核心产品参数（5条）

1. 产品系列：MKS ASTRON 2L 系列远程等离子源

2. 产品型号：FI20620-1

3. 适用设备：AMAT（Applied Materials）半导体设备

4. 合规认证：CE 标志

5. 产品状态：该型号为已停产产品

结尾： 综上所述，MKS FI20620-1（ASTRON 2L 系列 RPS 远程等离子源）作为半导体晶圆处理领域的等离子源设备，为刻蚀、沉积、清洗等关键工艺提供了可靠的等离子体环境。鉴于该型号已停产，实际采购中建议着重验证其实际工作状态与等离子输出性能。

MKS FI20620-1 远程等离子源  英文介绍

The MKS FI20620-1 Remote Plasma Source (RPS) is a radio frequency plasma power supply in the MKS ASTRON 2L series. This product adopts a remote plasma source (RPS) design, which separates the plasma generation area from the process chamber, effectively avoiding electrode contamination and metal sputtering. It is specially developed for high-precision and high-throughput processing in semiconductor wafer manufacturing.

1、 Product application areas (10 items)

Semiconductor wafer etching process

Semiconductor Chemical Vapor Deposition (CVD)

Semiconductor Physical Vapor Deposition (PVD)

Dry cleaning of semiconductor wafers

Photoresist removal (photoresist removal process)

Wafer surface activation treatment

Cleaning of semiconductor ALD/ALE chamber

Flat Panel Display (FPD) Panel Manufacturing

LED chip manufacturing

Manufacturing of photovoltaic panels

2、 Core product parameters (5 items)

Product series: MKS ASTRON 2L series remote plasma source

Product model: FI20620-1

Applicable equipment: AMAT (Applied Materials) semiconductor equipment

Compliance certification: CE mark

Product status: This model is a discontinued product

Conclusion: In summary, MKS FI2062-1 (ASTRON 2L series RPS remote plasma source), as a plasma source equipment in the field of semiconductor wafer processing, provides a reliable plasma environment for key processes such as etching, deposition, and cleaning. Considering that this model has been discontinued, it is recommended to focus on verifying its actual working condition and plasma output performance during actual procurement.

MKS FI20620-1 远程等离子源 产品图片

3.其他产品

HONEYWELL CC-PAIH01分布式控制系统模块
GHR9010100R0002 电源模块
HONEYWELL FC-PDIO01 安全数字I/O模块

4.其他产品

BENTLY 9200-01-01-10-00 Sensor module
AI3281 AI3281-A-V001 pulse output card
TRICONEX BI01 BI01-A-V001 Digital input module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com 

型号：MKS FI20620-1 远程等离子源

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货