SMC INR-495-025 循环冷水机 PDF资料
1.产 品 资 料 介 绍:
SMC INR-495-025 循环冷水机(Thermo-chiller)是 SMC INR-495 系列中的一款环保型冷冻式循环液温控设备,采用 CO₂(R744)自然冷媒,GWP(全球变暖潜能值)仅为 1,完全符合欧盟及美国最新环保法规要求。该产品符合 SEMI 行业标准(S2、S8、F47),专为半导体及电子制造等对温控精度和环保性有高要求的领域而设计。
一、产品应用领域(10条)
半导体制造设备(刻蚀、沉积等工艺)温控
半导体晶圆加工过程中的精密冷却
平板显示器(FPD)制造工艺温控
激光加工设备(切割、焊接、打标)冷却
光伏太阳能电池板制造工艺
LED 芯片制造与封装温控
医疗诊断与生命科学仪器冷却
分析仪器(色谱仪、光谱仪等)温控
电子束与离子束设备冷却
一般工业自动化设备的循环液温控
二、核心产品参数(5条)
产品系列:SMC INR-495 系列冷冻式循环冷水机(CO₂冷媒对应,型号 INR-495-025)
温度设定范围:-20℃ 至 70℃
冷却能力:8.5 kW
温度稳定性:±1.0℃
环保冷媒:CO₂(R744),GWP=1,符合 SEMI S2/S8/F47 标准
结尾: 综上所述,SMC INR-495-025 作为 INR-495 系列 CO₂冷媒循环冷水机的代表型号,凭借其 8.5 kW 冷却能力、-20℃ 至 70℃ 宽温控范围以及 GWP=1 的极致环保特性,为半导体及高端制造领域提供了兼顾高性能与可持续发展的温控解决方案
The SMC INR-495-025 Thermo chiller is an environmentally friendly cryogenic circulating liquid temperature control device in the SMC INR-495 series. It uses CO ₂ (R744) natural refrigerant and has a Global Warming Potential (GWP) of only 1, fully complying with the latest environmental regulations of the European Union and the United States. This product complies with SEMI industry standards (S2, S8, F47) and is designed specifically for fields such as semiconductor and electronic manufacturing that require high temperature control accuracy and environmental friendliness.
1、 Product application areas (10 items)
Temperature control of semiconductor manufacturing equipment (etching, deposition, etc. processes)
Precision cooling during semiconductor wafer processing
Flat Panel Display (FPD) Manufacturing Process Temperature Control
Cooling of laser processing equipment (cutting, welding, marking)
Manufacturing process of photovoltaic solar panels
LED chip manufacturing and packaging temperature control
Medical diagnosis and life science instrument cooling
Temperature control of analytical instruments (chromatograph, spectrometer, etc.)
Cooling of electron beam and ion beam equipment
Circulating liquid temperature control for general industrial automation equipment
2、 Core product parameters (5 items)
Product series: SMC INR-495 series refrigerated circulating water chiller (corresponding to CO ₂ refrigerant, model INR-495-025)
Temperature setting range: -20 ℃ to 70 ℃
Cooling capacity: 8.5 kW
Temperature stability: ± 1.0 ℃
Environmentally friendly refrigerant: CO ₂ (R744), GWP=1, compliant with SEMI S2/S8/F47 standards
Conclusion: In summary, SMC INR-495-025, as a representative model of INR-495 series CO ₂ refrigerant circulating chillers, provides a high-performance and sustainable temperature control solution for the semiconductor and high-end manufacturing fields with its 8.5 kW cooling capacity, wide temperature control range of -20 ℃ to 70 ℃, and ultimate environmental protection characteristics of GWP=1

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