Leybold 400110V0023 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍:
Leybold 400110V0023 涡轮分子泵(对应型号 TURBOVAC MAG W 1300 C)是 Leybold 旗下 MAG 系列磁悬浮涡轮分子泵的一员。该泵采用五轴主动式磁悬浮轴承技术,可实现无接触、无摩擦运行,专为半导体及高端工业领域中对清洁高真空有严苛要求的工艺而设计。
一、产品应用领域(10条)
半导体刻蚀工艺
半导体化学气相沉积(CVD)
半导体物理气相沉积(PVD)
半导体离子注入工艺
工业镀膜系统
平板显示器(FPD)制造
粒子加速器
科研与实验研究
分析仪器(质谱仪、电子显微镜等)
真空冶金与材料处理
二、核心产品参数(5条)产品型号:TURBOVAC MAG W 1300 C(料号 400110V0023)
进气口法兰:ISO250 ISO-F
排气口法兰:DN40 KF
抽速(N₂):约 1300 L/s
极限压力:<1×10⁻⁸ mbar
结尾: 综上所述,Leybold 400110V0023(TURBOVAC MAG W 1300 C)作为 MAG 系列磁悬浮分子泵的代表型号,凭借其无油洁净真空、高抽速和低维护特性,为半导体、镀膜及科研领域提供了可靠的高真空解决方案。
Leybold 400110V0023 涡轮分子泵 英文介绍
Leybold 400110V0023 Turbomolecular Pump (corresponding to model TURBOVAC MAG W 1300 C) is a member of Leybold's MAG series magnetic levitation turbomolecular pump. This pump adopts five axis active magnetic levitation bearing technology, which can achieve contactless and frictionless operation. It is designed specifically for processes in the semiconductor and high-end industrial fields that have strict requirements for clean high vacuum.
1、 Product application areas (10 items)
Semiconductor etching process
Semiconductor Chemical Vapor Deposition (CVD)
Semiconductor Physical Vapor Deposition (PVD)
Semiconductor ion implantation process
Industrial coating system
Flat Panel Display (FPD) Manufacturing
particle accelerator
Research and Experimental Studies
Analytical instruments (mass spectrometer, electron microscope, etc.)
Vacuum Metallurgy and Material Processing
2、 Core product parameters (5 items)
Product model: TURBOVAC MAG W 1300 C (part number 400110V0023)
Inlet flange: ISO250 ISO-F
Exhaust flange: DN40 KF
Extraction speed (N ₂): approximately 1300 L/s
Ultimate pressure: < 1 × 10 ⁻⁸ mbar
Conclusion: In summary, Leybold 400110V0023 (TURBOVAC MAG W 1300 C), as a representative model of the MAG series magnetic levitation molecular pump, provides a reliable high vacuum solution for the semiconductor, coating, and scientific research fields with its oil-free clean vacuum, high pumping speed, and low maintenance characteristics.
Leybold 400110V0023 涡轮分子泵 产品图片

3.其他产品
CI853 接口底板模块
Honeywell 900ES1-0100 数字式温度控制器
100472-012 网络平台键盘
4.其他产品
UAD206A101 3BHE019958R0101 controller card
UCD224A103 3BHE023681R0103 Control module
UCD240A101 3BHE022287R0101 controller card
| IC3600SOTD1E | CACR-SRCA20BBS | IC660ELB906S |
| IC3600SOTD1 | CACR-IR44SB | 131178-01 |
| IC3600SOSL2A | CACR-SR20BZ1SF | EPC-5 |
| IC3600SOSG1D | CACR-SR30BE12D-C | EPC5-33-00-UI |
| IC3600SOSG1 | GESPAC GESCIO-1 | 4522-167-02301 |
| IC3600SOSF1F1B | CACR-HR03BAB11 | 061-10318-0003 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:https://www.jiangxidcs.com



