ATS 4092318-001 三通道冷水机 PDF资料
1.产 品 资 料 介 绍:
ATS 4092318-001 三通道冷水机(对应型号 MPX-44BHH)是一款由 Advanced Thermal Sciences 制造的高精度温控设备,采用模块化多通道设计,专为半导体及高端制造领域中对温度稳定性有严苛要求的工艺场景而开发。
一、产品应用领域(10条)
半导体制造设备温度控制(CVD/PVD 工艺)
半导体刻蚀与灰化工艺冷却
湿法刻蚀工艺温控
离子注入设备冷却
光刻设备温控系统
晶圆切割与划片工艺
芯片封装与测试温控
高功率激光器冷却系统
医疗诊断与实验室设备精密温控
工业机械与测量仪器冷却
二、核心产品参数(5条)产品型号:MPX-44BHH(对应料号 4092318-001)
通道配置:三通道独立控温
品牌归属:Advanced Thermal Sciences(ATS)
适用标准:符合 SEMI S2、F47 规范,CE 认证
产品系列:ATS M-Pak 系列模块化冷水机
结尾: 综上所述,ATS 4092318-001(MPX-44BHH)作为 ATS M-Pak 系列三通道冷水机的代表型号,凭借其多通道独立控温能力与严格的行业标准合规性,为半导体及精密制造领域提供了可靠的热管理解决方案。
The ATS 4092318-001 three channel chiller (corresponding to model MPX-44BHH) is a high-precision temperature control device manufactured by Advanced Thermal Sciences. It adopts a modular multi-channel design and is specially developed for process scenarios in the semiconductor and high-end manufacturing fields that require strict temperature stability.
1、 Product application areas (10 items)
Temperature control of semiconductor manufacturing equipment (CVD/PVD process)
Semiconductor etching and ashing process cooling
Temperature control of wet etching process
Cooling of ion implantation equipment
Temperature control system for lithography equipment
Wafer cutting and slicing process
Chip packaging and testing temperature control
High power laser cooling system
Medical diagnosis and laboratory equipment precision temperature control
Cooling of industrial machinery and measuring instruments
2、 Core product parameters (5 items)
Product model: MPX-44BHH (corresponding to part number 4092318-001)
Channel configuration: Three independent temperature control channels
Brand affiliation: Advanced Thermal Sciences (ATS)
Applicable standards: Complies with SEMI S2, F47 specifications, CE certification
Product series: ATS M-Pak series modular chiller
Conclusion: In summary, ATS 4092318-001 (MPX-44BHH), as the representative model of ATS M-Pak series three channel chillers, provides a reliable thermal management solution for the semiconductor and precision manufacturing fields with its multi-channel independent temperature control capability and strict industry standard compliance.

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