SHIMADZU TMP-3403LMC-T4 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
SHIMADZU TMP-3403LMC-T4 涡轮分子泵 产品简介
SHIMADZU TMP-3403LMC-T4 是岛津公司为半导体及工业高真空应用设计的一款磁悬浮涡轮分子泵，常用于东京电子（TEL）等半导体设备的配套。
产品特点
采用磁悬浮轴承技术，无机械接触运行。
转子表面采用分散镀层处理，耐腐蚀性强。
配备紧凑型电源单元，体积小、重量轻。
前面板LCD显示屏，实时显示运行状态。
配备RS-232C和RS-485通信端口，支持远程监控。
泵速可在25%至100%范围内调节。
断电时利用再生电力维持磁悬浮，减少磨损。
更换泵缆时无需重新调整电源单元。
符合CE、TÜV、NRTL、SEMI S2等多项标准。
适用于半导体刻蚀、CVD等腐蚀性气体工艺。
产品参数
型号：TMP-3403LMC-T4。
制造商：SHIMADZU（岛津）。
额定转速：22,020 rpm。
入口法兰：VG350 / ISO320。
出口法兰：KF40。
综上所述，SHIMADZU TMP-3403LMC-T4 凭借其磁悬浮设计、耐腐蚀处理及紧凑的电源集成，能够为半导体及工业高真空工艺提供高效、可靠的真空解决方案。
SHIMADZU TMP-3403LMC-T4 涡轮分子泵 英文介绍
SHIMADZU TMP-3403LMC-T4 Turbomolecular Pump Product Introduction
SHIMADZU TMP-3403LMC-T4 is a magnetic levitation turbo molecular pump designed by Shimadzu Corporation for semiconductor and industrial high vacuum applications, commonly used in semiconductor equipment such as Tokyo Electronics (TEL).
Product Features
Adopting magnetic levitation bearing technology, it operates without mechanical contact.
The rotor surface is treated with a dispersed coating, which has strong corrosion resistance.
Equipped with a compact power unit, small in size and light in weight.
Front panel LCD display screen, real-time display of operating status.
Equipped with RS-232C and RS-485 communication ports, supporting remote monitoring.
The pump speed can be adjusted within the range of 25% to 100%.
Utilize regenerated power to maintain magnetic levitation and reduce wear during power outages.
When replacing the pump cable, there is no need to readjust the power unit.
Compliant with multiple standards such as CE, T Ü V, NRTL, SEMI S2, etc.
Suitable for corrosive gas processes such as semiconductor etching and CVD.
Product Parameters
Model: TMP-3403LMC-T4.
Manufacturer: SHIMADZU (Shimadzu).
Rated speed: 22020 rpm.
Inlet flange: VG350/ISO320.
Export flange: KF40.
In summary, SHIMADZU TMP-3403LMC-T4, with its magnetic levitation design, corrosion-resistant treatment, and compact power integration, can provide efficient and reliable vacuum solutions for semiconductor and industrial high vacuum processes.
SHIMADZU TMP-3403LMC-T4 涡轮分子泵 产品图片
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