Edwards YT66-C6-001 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
Edwards YT66-C6-001 涡轮分子泵 产品简介
Edwards YT66-C6-001 是 Edwards 为半导体及工业真空应用设计的一款高性能涡轮分子泵，常用于 Tokyo Electron（TEL）等半导体设备的配套与替换，确保高真空环境的稳定维持。
产品特点
由 Edwards 制造，适配 TEL 半导体设备配套需求。
额定转速达 27,500 rpm，满足高真空制程要求。
入口法兰采用 ISO 250/ISO 250F 标准接口，兼容主流真空系统。
出口法兰为 NW40/KF40，便于系统连接。
采用油润滑旋转叶片设计，配备润滑剂补充系统，延长使用寿命。
具备低速、中速、高速可调速度控制功能，提升运行效率。
噪音排放低至约 58 dBa，适合对噪音敏感的生产环境。
通过 CE 认证，符合国际安全标准。
结构坚固耐用，采用碳钢外壳和不锈钢滤网，具备一定的耐腐蚀性。
适用于半导体制造、工业超高真空工艺及低温设备等严苛场景。
产品参数
型号：YT66-C6-001 / STP-XA2703BV3。
制造商：Edwards。
额定转速：27,500 rpm。
入口法兰：ISO 250 / ISO 250F。
出口法兰：NW40 / KF40。
综上所述，Edwards YT66-C6-001 凭借其 27,500 rpm 的高转速、灵活的速度控制及可靠的油润滑设计，能够为半导体及工业高真空工艺提供稳定、高效的真空解决方案。
Edwards YT66-C6-001 涡轮分子泵 英文介绍
Edwards YT66-C6-001 Turbomolecular Pump Product Introduction
Edwards YT66-C6-001 is a high-performance turbo molecular pump designed by Edwards for semiconductor and industrial vacuum applications. It is commonly used for matching and replacing semiconductor equipment such as Tokyo Electron (TEL) to ensure stable maintenance of high vacuum environments.
Product Features
Made by Edwards, suitable for TEL semiconductor equipment matching needs.
The rated speed reaches 27500 rpm, meeting the requirements of high vacuum processes.
The inlet flange adopts ISO 250/ISO 250F standard interface, compatible with mainstream vacuum systems.
The export flange is NW40/KF40, which is convenient for system connection.
Designed with oil lubricated rotating blades and equipped with a lubricant replenishment system to extend their service life.
Equipped with adjustable speed control functions for low, medium, and high speeds to improve operational efficiency.
The noise emission is as low as about 58 dBa, suitable for noise sensitive production environments.
Passed CE certification and meets international safety standards.
The structure is sturdy and durable, with a carbon steel shell and stainless steel filter screen, possessing a certain degree of corrosion resistance.
Suitable for harsh scenarios such as semiconductor manufacturing, industrial ultra-high vacuum processes, and low-temperature equipment.
Product Parameters
Model: YT66-C6-001/STP-XA2703BV3.
Manufacturer: Edwards.
Rated speed: 27500 rpm.
Inlet flange: ISO 250/ISO 250F.
Export flange: NW40/KF40.
In summary, Edwards YT66-C6-001, with its high speed of 27500 rpm, flexible speed control, and reliable oil lubrication design, can provide stable and efficient vacuum solutions for semiconductor and industrial high vacuum processes.
Edwards YT66-C6-001 涡轮分子泵 产品图片
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