HF 3156360-015 射频发生器 PDF资料
1.产 品 资 料 介 绍:
HF 3156360-015 射频发生器 产品简介
HF 3156360-015 是 Advanced Energy(AE)生产的一款射频发生器,对应型号 HF Paramount 6013,在半导体等离子体工艺中为蚀刻、沉积等制程提供稳定的射频能量。
产品特点
由 Advanced Energy 制造,型号为 HF Paramount 6013。
输出功率为 6kW,满足中等至大功率制程需求。
输出频率为 13.56MHz(±0.7MHz),标准工业射频频率。
输入电源为三相 200-208VAC, 50/60Hz。
市场状态为工作正常剩余库存(Working Surplus),有使用痕迹但功能正常。
适用于半导体蚀刻、CVD 等等离子体工艺环境。
在半导体备件市场中有一定流通性,可供采购。
产品参数
型号:3156360-015 / HF Paramount 6013。
制造商:Advanced Energy。
输出功率:6kW。
输出频率:13.56MHz ±0.7MHz。
输入电源:3-phase, 200-208VAC, 50/60Hz。
综上所述,Advanced Energy HF Paramount 6013 作为一款 6kW 标准频率射频发生器,能够为半导体等离子体工艺提供可靠、稳定的射频能量源。
HF 3156360-015 射频发生器 英文介绍
HF 3156360-015 RF Generator Product Introduction
HF 3156360-015 is an RF generator produced by Advanced Energy (AE), corresponding to model HF Paramount 6013. It provides stable RF energy for etching, deposition, and other processes in semiconductor plasma technology.
Product Features
Made by Advanced Energy, model HF Paramount 6013.
The output power is 6kW, meeting the requirements of medium to high power processes.
The output frequency is 13.56MHz (± 0.7MHz), which is the standard industrial RF frequency.
The input power supply is three-phase 200-208VAC, 50/60Hz.
The market status is Working Surplus, with usage traces but normal functionality.
Suitable for plasma process environments such as semiconductor etching and CVD.
There is a certain degree of liquidity in the semiconductor spare parts market that can be purchased.
Product Parameters
Model: 3156360-015/HF Paramount 6013.
Manufacturer: Advanced Energy.
Output power: 6kW.
Output frequency: 13.56MHz ± 0.7MHz.
Input power supply: 3-phase, 200-208VAC, 50/60Hz.
In summary, the Advanced Energy HF Paramount 6013, as a 6kW standard frequency RF generator, can provide a reliable and stable RF energy source for semiconductor plasma processes.
HF 3156360-015 射频发生器 产品图片

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