Spectrum B-5002-12054 电力系统模块 PDF资料 

1.产 品 资 料 介 绍：

Spectrum B-5002-12054 电力系统模块 产品简介

Spectrum B-5002-12054 是 ENI Power Systems 为 Applied Materials（AMAT）半导体设备配套的一款射频发生器，在等离子体工艺中为蚀刻、沉积等制程提供稳定的射频能量。

产品特点

1. 由 ENI Power Systems 制造，隶属于 Spectrum 产品系列。

2. 归属于 AMAT 原厂备件体系，AMAT 备件号为 0190-42463。

3. 输出频率范围为 1.8 - 2.17 MHz。

4. 输入电源为三相 200-208VAC, 50/60Hz。

5. 输出功率为 5kW，适配中等功率制程需求。

6. 市场上有新品和正常工作品等多种供货状态可供选择。

7. 适用于 AMAT 半导体制造设备的维修替换。

8. 在半导体备件市场中有一定流通性。

9. 适用于半导体蚀刻、CVD 等对射频电源有严格要求的等离子体工艺环境。

产品参数

1. 型号：B-5002-12054 / Spectrum B-5002。

2. 制造商：ENI Power Systems。

3. AMAT 备件号：0190-42463。

4. 输出频率：1.8 - 2.17 MHz。

5. 输入电源：3-phase, 200-208VAC, 50/60Hz。

综上所述，Spectrum B-5002-12054 作为 ENI Power Systems 制造、AMAT 体系认证的 5kW 射频发生器，能够为半导体制造中的等离子体工艺提供可靠的射频能量源

Spectrum B-5002-12054 电力系统模块  英文介绍

Spectrum B-5002-12054 Power System Module Product Introduction

Spectrum B-5002-12054 is an RF generator developed by ENI Power Systems for Applied Materials (AMAT) semiconductor equipment, providing stable RF energy for processes such as etching and deposition in plasma technology.

Product Features

Made by ENI Power Systems and belonging to the Spectrum product line.

Belonging to the AMAT original spare parts system, the AMAT spare part number is 0190-42463.

The output frequency range is 1.8-2.17 MHz.

The input power supply is three-phase 200-208VAC, 50/60Hz.

The output power is 5kW, suitable for medium power process requirements.

There are various supply states to choose from in the market, including new products and normal working products.

Suitable for maintenance and replacement of AMAT semiconductor manufacturing equipment.

There is a certain degree of liquidity in the semiconductor spare parts market.

Suitable for plasma process environments with strict requirements for RF power supply, such as semiconductor etching and CVD.

Product Parameters

Model: B-5002-12054/Spectrum B-5002.

Manufacturer: ENI Power Systems.

AMAT spare part number: 0190-42463.

Output frequency: 1.8-2.17 MHz.

Input power supply: 3-phase, 200-208VAC, 50/60Hz.

In summary, Spectrum B-5002-12054, as a 5kW RF generator manufactured by ENI Power Systems and certified by AMAT system, can provide a reliable RF energy source for plasma processes in semiconductor manufacturing

Spectrum B-5002-12054 电力系统模块  产品图片

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型号：Spectrum B-5002-12054 电力系统模块

质保：一年

成色：全新/二手

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