Newport 0190-22248 晶圆机器人 PDF资料
1.产 品 资 料 介 绍：
Newport 0190-22248 晶圆机器人 产品简介
Newport 0190-22248 是 Newport（现隶属于 MKS Instruments）为 AMAT 半导体设备配套的一款 300mm 晶圆传输机器人，常见于 AMAT Endura PVD 等机型。
产品特点
专为 300mm 晶圆自动化传输设计。
适配 AMAT Endura、Centura 等主流设备。
采用边缘抓取技术，减少晶圆接触面积。
末端内置光学传感器，可检测晶圆位置。
中心定位精度可达 0.005 英寸。
可计算晶圆位置并在移动前纠偏，避免碰撞。
提供铜暴露和非铜暴露不同配置版本。
包含机器人本体、预对准器和控制器。
有原厂翻新和二手工作正常等多种供货状态。
适用于 300mm 晶圆的 PVD 等半导体工艺。
产品参数
型号：0190-22248。
品牌：Newport（Kensington Laboratories）。
AMAT 备件号：0190-22248。
晶圆规格：300mm（12 英寸）。
配套设备：AMAT Endura PVD、Centura 等。
综上所述，Newport 0190-22248 凭借其边缘抓取和内置传感技术，能够为 300mm 晶圆传输提供可靠的自动化解决方案。
Newport 0190-22248 Wafer Robot Product Introduction
Newport 0190-22248 is a 300mm wafer transfer robot developed by Newport (now under MKS Instruments) for AMAT semiconductor equipment, commonly used in AMAT Endura PVD and other models.
Product Features
Specially designed for automated transfer of 300mm wafers.
Compatible with mainstream devices such as AMAT Endura and Centura.
Adopting edge grasping technology to reduce the contact area of the wafer.
The end is equipped with an optical sensor that can detect the position of the wafer.
The center positioning accuracy can reach 0.005 inches.
Can calculate the position of the wafer and correct it before moving to avoid collisions.
Provide different configuration versions for copper exposure and non copper exposure.
Includes robot body, pre aligner, and controller.
There are various supply states such as original factory renovation and normal second-hand operation.
Suitable for semiconductor processes such as PVD on 300mm wafers.
Product Parameters
Model: 0190-22248.
Brand: Newport (Kensington Laboratories).
AMAT spare part number: 0190-22248.
Wafer specification: 300mm (12 inches).
Supporting equipment: AMAT Endura PVD, Centura, etc.
In summary, Newport 0190-22248, with its edge gripping and built-in sensing technology, can provide a reliable automation solution for 300mm wafer transfer.
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