ESA80W-HDF 干式真空泵 PDF资料
1.产 品 资 料 介 绍：
Edwards EUV3050H 真空干式泵 产品简介
Edwards EUV3050H 是 Edwards 专为半导体先进制程设计的一款干式真空泵，适用于 EUV 光刻、蚀刻、CVD 等严苛工艺。
产品特点
专为 EUV 光刻等先进半导体工艺设计。
通过 SEMI S2-1016 安全标准认证。
采用 XCEDE 表面处理技术，增强耐腐蚀性。
干式无油运行，保证清洁真空环境。
适用于多层蚀刻、CVD 沉积等恶劣制程。
具备腐蚀性气体和副产物处理能力。
结构坚固，适合长时间连续运行。
可在不增加新设备投资的前提下完成替换升级。
继承 iXH 系列成熟技术，可靠性高。
可提高产量并显著节省能源消耗。
产品参数
型号：EUV3050H。
制造商：Edwards。
输入电源：3-phase, 380-460VAC, 50/60Hz。
CE 认证：符合 CE 标志要求。
原厂备件号：NRY8RB000XS。
综上所述，Edwards EUV3050H 凭借其耐腐蚀设计、安全认证和升级便利性，能够为半导体先进制程提供可靠的真空解决方案。
ESA80W-HDF 干式真空泵 英文介绍
ESA80W-HDF is a dry vacuum pump in the Ebara ESA series, designed specifically for high-speed pumping scenarios in large vacuum chambers. It excels in processes such as LCD sputtering, vacuum drying, and large load lock.
Product Features
Suitable for high-speed pumping of large vacuum chambers, with a pumping speed of up to 8400 L/min (50/60Hz).
Equipped with automatic speed control function, the speed can be adaptively adjusted according to the pump load.
Adopting multi-stage Roots pump technology, it has intelligent rotor speed control and advanced interlocking functions.
Dry oil-free operation ensures a clean vacuum environment.
The ultimate pressure can reach 0.13 Pa, meeting the requirements of high vacuum processes.
CE certification is available, with optional SEMI-S2/NRTL certification.
Provide organic solvent exhaust options to meet various process requirements.
Optional corrosion-resistant material version (Nirsist cast iron material) to enhance durability.
Large models achieve low vibration and low noise operation, suitable for precision manufacturing environments.
Equipped with high-performance communication functions, it supports advanced control management such as data storage and alarm history backup.
Product Parameters
Model: ESA80W-HDF.
Manufacturer: Ebara.
Extraction speed: 8400 L/min (50/60Hz).
Ultimate pressure: 0.13 Pa.
Power input: 3-phase, 200-220VAC/380-440VAC, 50/60Hz.
In summary, Ebara ESA80W-HDF, with its 8400 L/min high pumping speed and speed adaptive control technology, can provide efficient and reliable vacuum solutions for large chamber processes such as LCD manufacturing and vacuum drying.
ESA80W-HDF 干式真空泵 产品图片
3.其他产品
REXROTH VM310 电源模块
HONEYWELL HCIX15-TE-FA-NC 触摸屏自动化模块
AO02 分散控制系统
4.其他产品
COMPACTPCI DMV2400A-CPCI Pulse output module
DO880-1 3BSE028588R1 processor input module
EMG ECU01 ECU01.5 Touch screen
| PMA23C-01100-00 | AMAT 0100-09302 | PFEA113-IP65 3BSE050092R65 |
| PMA23B-00114-00 | AMAT 0100-00055 | PFTL101AE |
| PMA230-1050B-02 | AMAT 0100-A1201 | PFTL 101B-10.0KN |
| PMA22S-01100-00 | AMAT 0100-35069 | PFRL101C |
| PMA22B-10114-01 | AMAT 0100-35213 | PFEA112 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
