Edwards EUV3050H 真空干式泵 PDF资料 

1.产 品 资 料 介 绍：

Edwards EUV3050H 真空干式泵 产品简介

Edwards EUV3050H 是 Edwards 专为半导体先进制程设计的一款干式真空泵，适用于 EUV 光刻、蚀刻、CVD 等严苛工艺。

产品特点

1. 专为 EUV 光刻等先进半导体工艺设计。

2. 通过 SEMI S2-1016 安全标准认证。

3. 采用 XCEDE 表面处理技术，增强耐腐蚀性。

4. 干式无油运行，保证清洁真空环境。

5. 适用于多层蚀刻、CVD 沉积等恶劣制程。

6. 具备腐蚀性气体和副产物处理能力。

7. 结构坚固，适合长时间连续运行。

8. 可在不增加新设备投资的前提下完成替换升级。

9. 继承 iXH 系列成熟技术，可靠性高。

10. 可提高产量并显著节省能源消耗。

产品参数

1. 型号：EUV3050H。

2. 制造商：Edwards。

3. 输入电源：3-phase, 380-460VAC, 50/60Hz。

4. CE 认证：符合 CE 标志要求。

5. 原厂备件号：NRY8RB000XS。

综上所述，Edwards EUV3050H 凭借其耐腐蚀设计、安全认证和升级便利性，能够为半导体先进制程提供可靠的真空解决方案。

Edwards EUV3050H 真空干式泵   英文介绍

Edwards EUV3050H Vacuum Dry Pump Product Introduction

Edwards EUV3050H is a dry vacuum pump designed by Edwards specifically for advanced semiconductor processes, suitable for harsh processes such as EUV lithography, etching, CVD, etc.

Product Features

Specially designed for advanced semiconductor processes such as EUV lithography.

Certified according to the SEMI S2-1016 safety standard.

Adopting XCEDE surface treatment technology to enhance corrosion resistance.

Dry oil-free operation ensures a clean vacuum environment.

Suitable for harsh processes such as multi-layer etching and CVD deposition.

Capable of handling corrosive gases and by-products.

The structure is sturdy and suitable for long-term continuous operation.

Replacement and upgrade can be completed without increasing investment in new equipment.

Inheriting mature technologies from the iXH series, with high reliability.

It can increase production and significantly save energy consumption.

Product Parameters

Model: EUV3050H.

Manufacturer: Edwards.

Input power supply: 3-phase, 380-460VAC, 50/60Hz.

CE certification: meets the requirements of the CE mark.

Original spare part number: NRY8RB000XS.

In summary, Edwards EUV3050H, with its corrosion-resistant design, safety certification, and ease of upgrade, can provide reliable vacuum solutions for advanced semiconductor processes.

Edwards EUV3050H 真空干式泵  产品图片

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型号：Edwards EUV3050H 真空干式泵

质保：一年

成色：全新/二手

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