Edwards ACF31B122300 干燥真空泵 PDF资料
1.产 品 资 料 介 绍：
Edwards ACF31B122300 干燥真空泵 产品简介
Edwards ACF31B122300（对应 iXH 3030T 系列）是 Edwards 专为严苛半导体制造环境设计的一款干式真空泵，凭借其强大的抽气能力和耐腐蚀特性，能够有效满足蚀刻、CVD 等对真空系统要求极高的工艺需求。
产品特点
隶属于 Edwards iXH 系列，专为恶劣工艺环境设计。
采用 XCEDE 耐腐蚀技术，延长使用寿命。
专为多层蚀刻等严苛制程设计，抗腐蚀能力强。
稳定的抽气性能，适合长时间连续运行。
干式设计，无油运行，保证清洁真空环境。
适配半导体蚀刻、CVD 等高要求工艺。
结构坚固，适合处理恶劣制程负载。
被 Applied Materials（AMAT）等主流设备厂商采用。
原厂备件号为 0190-40964，便于采购追溯。
提供翻新选项，降低采购成本。
产品参数
型号：ACF31B122300 / iXH 3030T。
输入电源：3-phase, 380-460VAC, 50/60Hz, 23A。
制造商：Edwards。
产品状态：翻新（Refurbished），购买时需确认当前供货状况。
应用领域：半导体制造设备配套。
综上所述，Edwards ACF31B122300 作为 iXH 系列干式真空泵，凭借其强大的耐腐蚀性能和稳定的抽气能力，能够为半导体严苛制程提供可靠的真空解决方案。
Edwards ACF31B122300 干燥真空泵 英文介绍
Edwards ACF31B122300 Drying Vacuum Pump Product Introduction
Edwards ACF31B122300 (corresponding to the iXH 3030T series) is a dry vacuum pump designed by Edwards specifically for harsh semiconductor manufacturing environments. With its powerful pumping capability and corrosion resistance, it can effectively meet the extremely high process requirements for vacuum systems such as etching and CVD.
Product Features
Belonging to the Edwards iXH series, designed specifically for harsh process environments.
Adopting XCEDE corrosion-resistant technology to extend the service life.
Specially designed for rigorous processes such as multi-layer etching, with strong corrosion resistance.
Stable pumping performance, suitable for long-term continuous operation.
Dry design, oil-free operation, ensuring a clean vacuum environment.
Suitable for high demand processes such as semiconductor etching and CVD.
The structure is sturdy and suitable for handling harsh process loads.
Used by mainstream equipment manufacturers such as Applied Materials (AMAT).
The original spare part number is 0190-40964, which facilitates procurement traceability.
Provide renovation options to reduce procurement costs.
Product Parameters
Model: ACF31B122300/iXH 3030T.
Input power supply: 3-phase, 380-460VAC, 50/60Hz, 23A.
Manufacturer: Edwards.
Product status: Refurbished, please confirm the current supply status when purchasing.
Application field: Supporting semiconductor manufacturing equipment.
In summary, Edwards ACF31B122300, as an iXH series dry vacuum pump, can provide reliable vacuum solutions for semiconductor harsh processes with its strong corrosion resistance and stable pumping ability.
Edwards ACF31B122300 干燥真空泵 产品图片
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