Spectrum 0190-28942 射频发生器 PDF资料
1.产 品 资 料 介 绍：
Spectrum 0190-28942 射频发生器 产品简介
Spectrum 0190-28942 是 ENI Power Systems 生产的一款大功率射频发生器，在半导体制造、薄膜沉积和等离子体加工等工业领域中，作为关键的能量源设备，负责为工艺腔室提供稳定、精准的射频能量。
产品特点
品牌归属：由 ENI Power Systems 制造，隶属于 Spectrum 产品系列。
功能定位：大功率射频发生器，为工业等离子体工艺提供能量源。
高功率输出：输出功率高达 11kW，适用于对能量要求较高的制程环节。
频率范围：输出频率覆盖 1.8 至 2.17 MHz。
输入电压：采用三相 200-208VAC 供电，符合工业标准。
认证标识：产品通过 CE 认证，符合安全与环保相关标准。
设备编号：原厂备件号 11002-02，便于追溯和采购。
应用领域：广泛用于半导体、平板显示及镀膜等对射频电源有严格要求的领域。
产品参数
型号：0190-28942 / Spectrum 11002-02。
制造商：ENI Power Systems。
输出功率：11,000W。
输出频率：1.8 - 2.17 MHz。
输入电源：3-phase, 200-208VAC。
综上所述，Spectrum 0190-28942 大功率射频发生器凭借其 11kW 的强大输出能力和稳定的频率特性，能够为半导体及高端工业制造中的等离子体工艺提供可靠的能量保障。
Spectrum 0190-28942 射频发生器 英文介绍
Spectrum 0190-28942 RF Generator Product Introduction
Spectrum 0190-28942 is a high-power RF generator produced by ENI Power Systems. It serves as a critical energy source equipment in industrial fields such as semiconductor manufacturing, thin film deposition, and plasma processing, responsible for providing stable and accurate RF energy to process chambers.
Product Features
Brand affiliation: Made by ENI Power Systems and belonging to the Spectrum product line.
Functional positioning: High power RF generator, providing energy source for industrial plasma processes.
High power output: With an output power of up to 11kW, it is suitable for process links with high energy requirements.
Frequency range: The output frequency covers 1.8 to 2.17 MHz.
Input voltage: Powered by three-phase 200-208VAC, in compliance with industry standards.
Certification mark: The product has passed CE certification and complies with safety and environmental standards.
Equipment number: Original spare part number 11002-02, for easy traceability and procurement.
Application areas: Widely used in fields such as semiconductors, flat panel displays, and coatings that have strict requirements for RF power supplies.
Product Parameters
Model: 0190-28942/Spectrum 11002-02.
Manufacturer: ENI Power Systems.
Output power: 11000W.
Output frequency: 1.8-2.17 MHz.
Input power supply: 3-phase, 200-208VAC.
In summary, the Spectrum 0190-28942 high-power RF generator, with its powerful output capability of 11kW and stable frequency characteristics, can provide reliable energy guarantee for plasma processes in semiconductor and high-end industrial manufacturing.
Spectrum 0190-28942 射频发生器 产品图片
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