Edwards YT79-0Z-010 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
Edwards YT79-0Z-010 涡轮分子泵 产品简介
Edwards YT79-0Z-010（对应 STP-iXR1606C 系列）是一款磁悬浮涡轮分子泵，专为半导体蚀刻、CVD 等严苛制程设计，凭借其高抽速、免维护和低振动特性，能够有效满足高要求工业应用的需求。
产品特点
采用磁悬浮轴承技术，转子完全悬浮，无机械接触，运行无油、无碳氢化合物污染。
免维护设计，因转子与轴承无接触，无需定期更换润滑油或进行泵体维护。
运行振动极低，适合对振动敏感的精密制程环境。
配备完全整合型控制器和电源，无需外接电缆和独立机架，节省安装空间。
集成控制器设计可减少占地面积，降低安装时间和成本。
节能技术贯穿产品设计，在高气流条件下能耗可降低多达 32%。
适用于半导体蚀刻、CVD、薄膜沉积等清洁真空领域。
高可靠性设计，适合需要长时间连续运行的应用场景。
支持高流量工艺，抽速和轻/重气体抽吸能力平衡。
配备接触轴承作为安全保护，转子异常时可安全停止。
产品参数
型号：YT79-0Z-010 / STP-iXR1606C。
额定转速：36,500 rpm。
入口法兰：VG200，出口法兰：NW40。
电源要求：200-240VAC，功耗 750VA，电流 3.75~3.12A。
控制器：集成型，无需独立控制器机架。
综上所述，Edwards YT79-0Z-010 凭借其磁悬浮免维护设计、低振动运行和集成化节能优势，能够为半导体及高端工业制程提供可靠、高效的高真空解决方案。
Edwards YT79-0Z-010 涡轮分子泵 英文介绍
Edwards YT79-0Z-010 Turbomolecular Pump Product Introduction
Edwards YT79-0Z-010 (corresponding to STP-iXR1606C series) is a magnetic levitation turbo molecular pump designed for demanding processes such as semiconductor etching and CVD. With its high pumping speed, maintenance free, and low vibration characteristics, it can effectively meet the needs of high demand industrial applications.
Product Features
Using magnetic levitation bearing technology, the rotor is completely suspended, without mechanical contact, and operates without oil or hydrocarbon pollution.
Maintenance free design, as there is no contact between the rotor and bearings, there is no need to regularly replace lubricating oil or perform pump body maintenance.
Operating with extremely low vibration, suitable for precision process environments that are sensitive to vibration.
Equipped with a fully integrated controller and power supply, no external cables or independent racks are required, saving installation space.
Integrated controller design can reduce footprint, installation time, and costs.
Energy saving technology runs through product design, reducing energy consumption by up to 32% under high airflow conditions.
Suitable for semiconductor etching CVD、 Clean vacuum fields such as thin film deposition.
High reliability design, suitable for application scenarios that require long-term continuous operation.
Support high flow processes, balancing pumping speed and light/heavy gas suction capacity.
Equipped with contact bearings as safety protection, it can safely stop when the rotor is abnormal.
Product Parameters
Model: YT79-0Z-010/STP-iXR1606C.
Rated speed: 36500 rpm.
Inlet flange: VG200, outlet flange: NW40.
Power requirements: 200-240VAC, power consumption 750VA, current 3.75-3.12A.
Controller: Integrated type, no need for a separate controller rack.
In summary, Edwards YT79-0Z-010, with its maintenance free magnetic levitation design, low vibration operation, and integrated energy-saving advantages, can provide reliable and efficient high vacuum solutions for semiconductor and high-end industrial processes.
Edwards YT79-0Z-010 涡轮分子泵 产品图片
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