Edwards STP-iXR1606C 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
Edwards STP-iXR1606C 涡轮分子泵
该型号为Edwards STP-iXR系列磁悬浮涡轮分子泵，专为半导体及高真空工业领域的高要求应用而设计。
产品特点
采用磁悬浮轴承技术，转子无接触运行，几乎无磨损，可靠性高，使用寿命长。
无油运行结构，可创造极高洁净度的真空环境，满足半导体等行业的严苛要求。
运行噪音和振动极低，减少对精密制程和洁净室环境的干扰。
专为半导体制造等严苛工艺环境设计，具有较强的工艺气体兼容性。
多级涡轮叶片结构，可实现高压缩比和稳定的极限真空度。
结构紧凑，占地面积小，便于设备集成与产线布局。
适用于刻蚀、CVD、PVD等半导体制造关键工艺环节。
适用于表面科学、加速器物理等科研领域的高真空需求。
配备标准真空法兰接口，适配主流真空系统。
兼容标准真空系统控制协议，支持与上位机集成监控。
核心参数
制造商：Edwards。
型号：STP-iXR1606C。
类型：磁悬浮涡轮分子泵。
产品状态：二手市场有流通，可作为备件采购。
总结
Edwards STP-iXR1606C是一款面向半导体及高真空应用领域的磁悬浮涡轮分子泵。它以无油洁净、低振动和高可靠性为核心优势，适用于刻蚀、CVD等对真空环境要求极为严格的工艺场景
Edwards STP-iXR1606C 涡轮分子泵 英文介绍
Edwards STP-iXR1606C Turbomolecular Pump
This model is the Edwards STP iXR series magnetic levitation turbo molecular pump, designed specifically for high demand applications in the semiconductor and high vacuum industries.
Product Features
Adopting magnetic levitation bearing technology, the rotor operates without contact, with almost no wear, high reliability, and long service life.
Oil free operating structure can create a highly clean vacuum environment, meeting the stringent requirements of industries such as semiconductors.
The operation noise and vibration are extremely low, reducing interference with precision processes and clean room environments.
Specially designed for harsh process environments such as semiconductor manufacturing, with strong process gas compatibility.
Multi stage turbine blade structure can achieve high compression ratio and stable ultimate vacuum degree.
Compact structure, small footprint, convenient for equipment integration and production line layout.
Suitable for key semiconductor manufacturing processes such as etching, CVD, PVD, etc.
Suitable for high vacuum requirements in research fields such as surface science and accelerator physics.
Equipped with standard vacuum flange interface, compatible with mainstream vacuum systems.
Compatible with standard vacuum system control protocols and supports integrated monitoring with upper computer.
Core parameters
Manufacturer: Edwards.
Model: STP iXR1606C.
Type: Magnetic levitation turbo molecular pump.
Product status: There is circulation in the second-hand market and it can be purchased as spare parts.
Summary
Edwards STP-iXR1606C is a magnetic levitation turbo molecular pump designed for semiconductor and high vacuum applications. It has the core advantages of oil-free cleanliness, low vibration, and high reliability, and is suitable for process scenarios such as etching and CVD that require extremely strict vacuum environments
Edwards STP-iXR1606C 涡轮分子泵 产品图片
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