Yaskawa XU-RC350S-J01 晶圆机械手 PDF资料
1.产 品 资 料 介 绍：
Yaskawa XU-RC350S-J01 晶圆机械手
该型号为安川电机专为半导体晶圆传输设计的M101系列真空晶圆机械手，是旧款半导体产线中负责晶圆取放、传送的核心自动化组件。
产品特点
专为真空晶圆传输设计，实现R、Z、θ多轴伸缩旋转升降运动的精密轨迹运算。
采用多轴伺服闭环控制，重复定位精度可达0.1mm级别。
内置软限位与硬限位双重保护机制，有效防止机械手碰撞晶圆。
具备过载、过流、过温及通讯异常等硬件保护功能。
支持高速工业总线通信，可对接半导体设备主机完成工艺交互。
内置自适应振动抑制算法，高速运行时抖动小、无晶圆碰撞。
集成STO安全转矩截止电路，紧急停止保护符合洁净设备安全规范。
板载数字IO接口，可对接真空传感器、夹具气路等外围信号。
洁净室适配版本，满足半导体ISO 1级无尘车间使用要求。
模块化插槽安装，支持多轴独立单元分别更换维护。
核心参数
型号归属：安川M101晶圆机械手系列伺服控制单元。
适配控制柜：XU-RC350S系列控制柜内部插槽安装。
电源规格：三相200-230V AC，50/60Hz。
产品状态：停产备件，主要用于半导体旧设备维修替换。
产地：日本。
总结
Yaskawa XU-RC350S-J01是安川M101系列晶圆机械手的专用伺服控制单元，负责硅片搬运过程中的多轴精密运动控制。凭借高精度闭环定位、双重安全保护和洁净室适配能力，该型号在旧款半导体晶圆传输设备中扮演着核心角色
Yaskawa XU-RC350S-J01 晶圆机械手 英文介绍
Yaskawa XU-RC350S-J01 Wafer Robot
This model is the M101 series vacuum wafer manipulator designed by Yaskawa Electric specifically for semiconductor wafer transfer. It is the core automation component responsible for wafer handling and transfer in the old semiconductor production line.
Product Features
Specially designed for vacuum wafer transfer, achieving precise trajectory calculation for R, Z, and θ multi axis telescopic rotation lifting motion.
Adopting multi axis servo closed-loop control, the repeated positioning accuracy can reach the level of 0.1mm.
Built in soft and hard limit dual protection mechanisms effectively prevent the robotic arm from colliding with the wafer.
It has hardware protection functions such as overload, overcurrent, overheating, and communication abnormalities.
Supports high-speed industrial bus communication and can interface with semiconductor equipment hosts to complete process interaction.
Built in adaptive vibration suppression algorithm, with minimal vibration and no wafer collision during high-speed operation.
Integrated STO safety torque cutoff circuit, emergency stop protection complies with clean equipment safety regulations.
Onboard digital IO interface, capable of interfacing with peripheral signals such as vacuum sensors and fixture air circuits.
Cleanroom adaptation version, meeting the requirements for semiconductor ISO Class 1 cleanroom use.
Modular slot installation, supporting separate replacement and maintenance of multiple independent units.
Core parameters
Model attribution: Yaskawa M101 wafer manipulator series servo control unit.
Adaptation control cabinet: XU-RC350S series control cabinet internal slot installation.
Power specifications: three-phase 200-230V AC, 50/60Hz.
Product status: Discontinued spare parts, mainly used for repairing and replacing old semiconductor equipment.
Origin: Japan.
Summary
Yaskawa XU-RC350S-J01 is a dedicated servo control unit for the Yaskawa M101 series wafer manipulator, responsible for multi axis precision motion control during silicon wafer handling. With high-precision closed-loop positioning, dual safety protection, and cleanroom adaptation capabilities, this model plays a core role in older semiconductor wafer transfer equipment
Yaskawa XU-RC350S-J01 晶圆机械手 产品图片
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