AMAT 0190-54045 氦气低温压缩机 PDF资料
1.产 品 资 料 介 绍：
AMAT 0190-54045 氦气低温压缩机
该型号为Brooks Automation（原CTI-Cryogenics）生产的IS-1000氦气低温压缩机，由AMAT定制贴牌，用于半导体设备中的低温泵冷却系统。
产品特点
由Brooks Automation（原CTI-Cryogenics）制造，型号为IS-1000。
作为低温冷却系统的核心部件，通过压缩高纯氦气在闭环回路中循环，为低温泵提供制冷所需的工作条件。
电源规格为三相480V AC。
在二手设备市场中以新库存剩余状态流通，附带出厂测试报告。
适用于半导体离子注入、刻蚀、PVD等制程设备中的低温泵配套冷却系统。
核心参数
制造商：Brooks Automation（原CTI-Cryogenics）/ AMAT OEM版。
型号：IS-1000。
部件编号：0190-54045。
电源输入：三相480V AC。
总结
AMAT 0190-54045（Brooks IS-1000）是AMAT定制的氦气低温压缩机，为半导体设备中的低温
Edwards AC6E1B123300XS 干式真空泵 英文介绍
AMAT 0190-54045 Helium Low Temperature Compressor
This model is the IS-1000 helium low-temperature compressor produced by Brooks Automation (formerly CTI Kryogenics), customized and branded by AMAT, used for low-temperature pump cooling systems in semiconductor equipment.
Product Features
Manufactured by Brooks Automation (formerly CTI Kryogenics), model IS-1000.
As the core component of the low-temperature cooling system, it provides the necessary working conditions for the refrigeration of the low-temperature pump by compressing high-purity helium gas and circulating it in a closed-loop loop.
The power specification is three-phase 480V AC.
Circulation in the second-hand equipment market with new inventory remaining, accompanied by factory test reports.
Suitable for low-temperature pump cooling systems in semiconductor ion implantation, etching, PVD and other process equipment.
Core parameters
Manufacturer: Brooks Automation (formerly CTI Kryogenics)/AMAT OEM version.
Model: IS-1000.
Part number: 0190-54045.
Power input: three-phase 480V AC.
Summary
AMAT 0190-54045 (Brooks IS-1000) is a helium low-temperature compressor customized by AMAT for low-temperature applications in semiconductor equipment
Edwards AC6E1B123300XS 干式真空泵 产品图片
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