Edwards STP-XA3203CV 涡轮分子泵 PDF资料
1.产 品 资 料 介 绍：
Edwards STP-XA3203CV 涡轮分子泵
该型号为Edwards STP-XA系列的一款高性能磁悬浮涡轮分子泵，型号末尾的"CV"标识其具备增强型耐腐蚀设计并集成了温度管理系统（TMS），适用于半导体制造、薄膜沉积、科研分析等对高洁净度和严苛工艺气体环境有要求的领域。
产品特点
采用磁悬浮轴承技术，转子在无接触状态下高速旋转，几乎无机械磨损，显著提高可靠性并延长使用寿命，同时运行噪音和振动极低。
型号后缀"CV"代表其具有增强的耐腐蚀性能，并配备温度管理系统（TMS），该系统能主动监控并调节泵体温度，有效减少工艺副产物在泵内的沉积与腐蚀。
兼容氯气、氟气等特殊制程气体，适用于半导体行业的多种严苛工艺环境。
支持垂直和水平多种安装方向，配备水冷系统（TMS控制），可灵活适配不同系统集成需求。
泵体采用无油设计，配合磁悬浮技术，可创造极高清洁度的真空环境。
核心参数
抽速：氮气（N₂）最高可达3200 L/s。
极限压力：可达10⁻⁷ Pa量级（烘烤后）。
进气口法兰：ISO320F。
额定转速：27,500 rpm。
电源输入：AC 200-240V。
总结
Edwards STP-XA3203CV是一款集高性能与高可靠性于一体的磁悬浮涡轮分子泵。它通过创新的磁悬浮技术和针对严苛工艺优化的温度管理系统，在实现超高真空与高抽速的同时，有效解决了工艺气体对泵体的腐蚀和沉积问题，是半导体等高端制造领域对清洁、稳定真空环境的理想选择
Edwards AC6E1B123300XS 干式真空泵 英文介绍
Edwards STP-XA3203CV Turbomolecular Pump
This model is a high-performance magnetic levitation turbo molecular pump from the Edwards STP-XA series. The "CV" at the end of the model indicates its enhanced corrosion resistance design and integrated temperature management system (TMS). It is suitable for fields such as semiconductor manufacturing, thin film deposition, scientific research analysis, etc. that require high cleanliness and harsh process gas environments.
Product Features
By using magnetic levitation bearing technology, the rotor rotates at high speed without contact, with almost no mechanical wear, significantly improving reliability and extending service life, while operating with extremely low noise and vibration.
The suffix "CV" represents its enhanced corrosion resistance and is equipped with a temperature management system (TMS), which can actively monitor and adjust the pump body temperature, effectively reducing the deposition and corrosion of process by-products in the pump.
Compatible with special process gases such as chlorine and fluorine, suitable for various harsh process environments in the semiconductor industry.
Supports multiple installation directions vertically and horizontally, equipped with a water cooling system (TMS control), which can flexibly adapt to different system integration requirements.
The pump body adopts an oil-free design, combined with magnetic levitation technology, which can create an extremely high cleanliness vacuum environment.
Core parameters
Extraction speed: Nitrogen (N ₂) can reach up to 3200 L/s.
Ultimate pressure: up to the level of 10 ⁻⁷ Pa (after baking).
Inlet flange: ISO320F.
Rated speed: 27500 rpm.
Power input: AC 200-240V.
Summary
Edwards STP-XA3203CV is a magnetic levitation turbo molecular pump that combines high performance and high reliability. It effectively solves the corrosion and deposition problems of process gases on the pump body while achieving ultra-high vacuum and high pumping speed through innovative magnetic levitation technology and temperature management system optimized for rigorous processes. It is an ideal choice for clean and stable vacuum environments in high-end manufacturing fields such as semiconductors
Edwards AC6E1B123300XS 干式真空泵 产品图片
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