Edwards AC6E1B123300XS 干式真空泵  PDF资料 

1.产 品 资 料 介 绍：

Edwards AC6E1B123300XS 干式真空泵

该型号属于 Edwards iXH 4540HT 系列干式真空泵，采用多级罗茨设计，定位于半导体制造等严苛工艺场景。

产品特点

• 属于 Edwards iXH 系列干式真空泵，该系列专为严苛制程能力、稳定性和低拥有成本而设计。

• 采用高效罗茨机构，可显著降低输入功率，比上一代干泵降低约 60%，减少环境影响与使用成本。

• 气体阻隔技术与热设计改进使耐腐蚀性能比 iH 系列产品高出四倍。

• 先进的粉末处理功能可为多层蚀刻工艺提供最大的可靠性并延长泵的使用寿命。

• 紧凑轻量化设计，噪音和振动极低，适合对运行环境要求较高的洁净生产场景。

• 无需预防性维护，可在重大检修之间持续运行。

• 配备不锈钢水冷系统与多模式气体模块，支持 3/8 英寸快速连接注水接口。

• 适用于负载锁、传输、蚀刻、CVD、PVD、RTP 等半导体制造关键工艺。

核心参数

• 型号归属：iXH 4540HT 系列。

• 部件编号：AC6E1B123300XS。

• 峰值抽速：1200 m³/h（645 CFM）。

• 极限压力：3.7 × 10⁻³ Torr。

• 电源：三相 200-230V AC，50/60Hz。

总结
Edwards AC6E1B123300XS（iXH 4540HT）是一款面向半导体严苛制程的高性能干式真空泵。它以显著降低的能耗、优异的耐腐蚀性和紧凑设计为核心优势，为多层蚀刻、CVD 等对可靠性和洁净度要求极高的工艺场景提供了高效、可靠的解决方案

Edwards AC6E1B123300XS 干式真空泵   英文介绍

Edwards AC6E1B123300XS Dry Vacuum Pump

This model belongs to the Edwards iXH 4540HT series dry vacuum pump, which adopts a multi-stage Roots design and is positioned for harsh process scenarios such as semiconductor manufacturing.

Product Features

Belonging to the Edwards iXH series of dry vacuum pumps, this series is designed for rigorous process capability, stability, and low cost of ownership.

By adopting an efficient Roots mechanism, the input power can be significantly reduced, by about 60% compared to the previous generation dry pump, reducing environmental impact and operating costs.

Gas barrier technology and thermal design improvements result in corrosion resistance four times higher than iH series products.

Advanced powder processing capabilities can provide maximum reliability for multi-layer etching processes and extend the service life of pumps.

Compact and lightweight design, with extremely low noise and vibration, suitable for clean production scenarios with high operating environment requirements.

No preventive maintenance is required, and it can continue to operate between major overhauls.

Equipped with stainless steel water cooling system and multi-mode gas module, supporting 3/8-inch quick connect water injection interface.

Suitable for key semiconductor manufacturing processes such as load locking, transmission, etching, CVD, PVD, RTP, etc.

Core parameters

Model attribution: iXH 4540HT series.

Part number: AC6E1B123300XS.

Peak pumping speed: 1200 m ³/h (645 CFM).

Ultimate pressure: 3.7 × 10 ⁻ ³ Torr.

Power supply: three-phase 200-230V AC, 50/60Hz.

Summary

Edwards AC6E1B123300XS (iXH 4540HT) is a high-performance dry vacuum pump designed for semiconductor demanding processes. It has the core advantages of significantly reduced energy consumption, excellent corrosion resistance, and compact design, providing efficient and reliable solutions for highly reliable and clean process scenarios such as multi-layer etching and CVD

Edwards AC6E1B123300XS 干式真空泵  产品图片

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型号：Edwards AC6E1B123300XS 干式真空泵

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

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