RECIF SRT300F60 端口单臂晶圆转移工具 PDF资料
1.产 品 资 料 介 绍：
RECIF SRT300F60 端口单臂晶圆转移工具
该型号为RECIF Technologies生产的SRT300系列晶圆分选机，具体配置为G3 plus版本，配备4个装载端口和单臂机械手，适用于300mm晶圆的自动化传输与分选操作。
产品特点
属于RECIF SRT300系列晶圆处理机，专为半导体洁净室环境中的晶圆清洁、检测与传输而设计。
支持200mm、300mm及450mm直径晶圆处理，适配多种晶圆尺寸需求。
采用模块化设计，可根据具体应用场景进行配置定制，包含数字晶盒装载机、精密对准系统、晶圆传输臂、旋转台及可选传送带等组件。
配备先进的自动化系统与精密机器视觉，能够准确可靠地执行基板处理任务，确保产品输出的一致性。
采用专利振动机构进行晶圆清洁，可在不损伤基板材料的情况下去除颗粒与污染物。
机器视觉设备提供高精度检测能力，保证稳定的产品质量输出。
配备内置实时诊断单元，支持预防性维护与故障排查，减少非计划停机。
采用专利双伺服控制技术，确保从晶盒装载机到基板手臂的稳定晶圆传输。
配备直观易用的图形用户界面，操作培训时间短，有效减少停机时间。
内置紧急停止和安全互锁等多重安全功能，保障设备与操作人员安全。
核心参数
型号：SRT300F60 G3 plus。
晶圆尺寸：300mm（12英寸）。
配置：4端口、单臂。
电源：110V，60Hz。
制造年份：约2007年。
总结
RECIF SRT300F60 G3 plus是一款面向300mm晶圆制造的自动化传输与分选设备。它凭借模块化设计、先进的机器视觉系统及专利振动清洁技术，在晶圆传输效率和检测精度方面具有突出表现。其直观的操作界面和多规格晶圆兼容能力，使其能够较好地满足半导体生产线对自动化、洁净度和稳定性的要求
RECIF SRT300F60 端口单臂晶圆转移工具 英文介绍
RECIF SRT300F60 port single arm wafer transfer tool
This model is the SRT300 series wafer sorting machine produced by RECIF Technologies, with a specific configuration of G3 plus version, equipped with 4 loading ports and a single arm robotic arm, suitable for automated transfer and sorting operations of 300mm wafers.
Product Features
Belonging to the RECIF SRT300 series wafer processing machine, designed specifically for wafer cleaning, inspection, and transportation in semiconductor cleanroom environments.
Supports wafer processing with diameters of 200mm, 300mm, and 450mm, suitable for various wafer size requirements.
Adopting modular design, it can be configured and customized according to specific application scenarios, including components such as digital crystal box loader, precision alignment system, wafer transfer arm, rotary table, and optional conveyor belt.
Equipped with advanced automation systems and precision machine vision, it can accurately and reliably perform substrate processing tasks, ensuring consistency in product output.
Using a patented vibration mechanism for wafer cleaning can remove particles and contaminants without damaging the substrate material.
Machine vision equipment provides high-precision detection capabilities to ensure stable product quality output.
Equipped with a built-in real-time diagnostic unit, supporting preventive maintenance and troubleshooting, reducing unplanned downtime.
Adopting patented dual servo control technology to ensure stable wafer transfer from the wafer box loader to the substrate arm.
Equipped with an intuitive and easy-to-use graphical user interface, the operation training time is short, effectively reducing downtime.
Built in multiple safety functions such as emergency stop and safety interlock ensure the safety of equipment and operators.
Core parameters
Model: SRT300F60 G3 plus.
Wafer size: 300mm (12 inches).
Configuration: 4-port, single arm.
Power supply: 110V, 60Hz.
Year of manufacture: around 2007.
Summary
RECIF SRT300F60 G3 plus is an automated transfer and sorting equipment designed for 300mm wafer manufacturing. It has outstanding performance in wafer transfer efficiency and detection accuracy with its modular design, advanced machine vision system, and patented vibration cleaning technology. Its intuitive operating interface and compatibility with multiple specifications of wafers enable it to better meet the requirements of semiconductor production lines for automation, cleanliness, and stability
RECIF SRT300F60 端口单臂晶圆转移工具 产品图片
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