Edwards A57222958 干式真空泵  PDF资料 

1.产 品 资 料 介 绍：

Edwards A57222958 干式真空泵

该型号对应 Edwards iHX 610 系列干式真空泵，属于英特尔定制版本，适用于半导体等严苛制程场景。

产品特点

• 属于 iHX 610 系列干式真空泵，为英特尔 OEM 定制版本。

• 采用多级罗茨干式泵送结构，运行无需油或水作为工作介质，提供清洁无油的真空环境，适合洁净度要求高的工艺场景。

• 该系列专为半导体制造等恶劣工艺环境设计，采用 XCEDE 技术增强耐腐蚀性，适用于多层蚀刻等严苛制程。

• 相比上一代干泵，iHX 系列能耗降低约 60%，有助于减少运行成本与碳排放。

• 紧凑化集成设计，占地面积小，便于在半导体产线中灵活布局。

• 适用于蚀刻、CVD、PVD、负载锁、传输腔等半导体制造关键工艺环节。

• 在二手设备市场中有流通，可作为替代备件采购。

核心参数

• 型号归属：iHX 610 系列。

• 部件编号：A57222958。

• 定制版本：Intel 2 LV OEM 版。

总结
Edwards A57222958（iHX 610 Intel 定制版）是一款面向半导体行业的干式真空泵。它以无油清洁、高耐腐蚀性和显著降低的能耗为核心特点，适合蚀刻、CVD 等对可靠性和洁净度要求极高的工艺场景，

Edwards A57222958 干式真空泵   英文介绍

Edwards A57222958 Dry Vacuum Pump

This model corresponds to the Edwards iHX 610 series dry vacuum pump, which is a customized version from Intel and suitable for harsh process scenarios such as semiconductors.

Product Features

Belonging to the iHX 610 series dry vacuum pump, it is a customized version for Intel OEM.

Adopting a multi-stage Roots dry pumping structure, the operation does not require oil or water as the working medium, providing a clean and oil-free vacuum environment, suitable for process scenarios with high cleanliness requirements.

This series is designed for harsh process environments such as semiconductor manufacturing, using XCEDE technology to enhance corrosion resistance, and is suitable for harsh processes such as multi-layer etching.

Compared to the previous generation of dry pumps, the iHX series has reduced energy consumption by about 60%, which helps to reduce operating costs and carbon emissions.

Compact integrated design, small footprint, easy to flexibly layout in semiconductor production lines.

Suitable for etching CVD、PVD、 Key semiconductor manufacturing processes such as load locks and transmission cavities.

It is circulated in the second-hand equipment market and can be purchased as a substitute spare part.

Core parameters

Model attribution: iHX 610 series.

Part number: A57222958.

Customized version: Intel 2 LV OEM version.

Summary

Edwards A57222958 (iHX 610 Intel Custom Edition) is a dry vacuum pump designed for the semiconductor industry. It is characterized by oil-free cleaning, high corrosion resistance, and significantly reduced energy consumption, making it suitable for process scenarios such as etching and CVD that require high reliability and cleanliness,

Edwards A57222958 干式真空泵  产品图片

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型号：Edwards A57222958 干式真空泵

质保：一年

成色：全新/二手

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