Spectrum 0190-22201 射频发生器 PDF资料
1.产 品 资 料 介 绍：
Spectrum 0190-22201 射频发生器
该型号为 ENI（现为 MKS Instruments 旗下）生产的 Spectrum 系列射频发生器，适用于等离子体加工、半导体制造等工业应用场景。
产品特点
属于 ENI Spectrum 系列射频发生器，型号标识为 Spectrum 11002-00。
为应用材料半导体设备提供的 OEM 版本部件，部件编号为 0190-22201。
输入电源规格为三相 200V AC。
经过原厂翻新，配备翻新测试报告，品质有保障。
在二手工业设备市场中有流通，可作为替代备件采购。
核心参数
制造商：ENI（MKS Instruments）。
型号：Spectrum 11002-00。
部件编号：0190-22201。
客户料号：500126953。
电源输入：三相 200V AC。
总结
Spectrum 0190-22201 是由 ENI 制造的一款工业级射频发生器，主要作为应用材料半导体设备的 OEM 备件使用。该型号在三相 200V 电源下运行
Spectrum 0190-22201 射频发生器 英文介绍
Spectrum 0190-22201 RF Generator
This model is a Spectrum series RF generator produced by ENI (now under MKS Instruments), suitable for industrial applications such as plasma processing and semiconductor manufacturing.
Product Features
Belonging to the ENI Spectrum series RF generator, the model number is Spectrum 11002-00.
The OEM version component provided for semiconductor equipment with application materials, part number 0190-22201.
The input power specification is three-phase 200V AC.
After original factory renovation, equipped with renovation test reports, the quality is guaranteed.
It has circulation in the second-hand industrial equipment market and can be purchased as a substitute spare part.
Core parameters
Manufacturer: ENI (MKS Instruments).
Model: Spectrum 11002-00.
Part number: 0190-22201.
Customer part number: 500126953.
Power input: three-phase 200V AC.
Summary
Spectrum 0190-22201 is an industrial grade RF generator manufactured by ENI, mainly used as an OEM spare part for semiconductor equipment in application materials. This model operates on a three-phase 200V power supply
Spectrum 0190-22201 射频发生器 产品图片
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