Edwards NRY24F000 真空泵 PDF资料
1.产 品 资 料 介 绍：
Edwards NRY24F000 干式真空泵
该型号属于 Edwards iXH 1220H 系列干式真空泵，采用多级罗茨设计，定位于半导体制造等对真空洁净度和可靠性要求极高的严苛工艺场景。
产品特点
干式泵送结构，运行过程无需使用油或水作为工作介质，可提供清洁无油的真空环境。
多级罗茨设计，兼顾高抽速与稳定的极限真空度，适合高负荷连续运行工况。
采用变频驱动技术，可根据实际工艺负载自动调节运行状态，有助于降低能耗与使用成本。
紧凑化集成设计，占地面积小，便于在半导体产线或洁净室环境中灵活布局。
适用于负载锁、传输腔、蚀刻、CVD、PVD、RTP等半导体制造关键工艺环节。
全封闭式结构设计，运行噪音和振动水平较低，减少对精密制程的干扰。
水冷式冷却系统，确保泵体在大功率长时间运行下的热稳定性。
标配行业标准通讯接口，支持与上位机或工厂自动化系统集成监控。
符合CE等国际安全标准认证，满足全球化设备进出口与安装要求。
该系列产品在二手设备市场亦有流通，涵盖制造商翻新版本，提供一定的品质保障选项。
核心参数
型号归属：iXH 1220H 系列。
部件编号：NRY24F000（另有NRY24F000XS版本）。
电源：三相 208V AC，50/60Hz。
产地与制造：Edwards（原厂制造）。
总结
Edwards NRY24F000（iXH 1220H）是一款面向半导体行业严苛制程的高性能干式真空泵。它以无油清洁、稳定可靠的多级罗茨技术为基础，通过变频驱动与紧凑化设计，在抽速、能耗与空间利用之间实现了良好的平衡，能够满足高端制造业对真空设备可靠性和洁净度的严格要求。
Edwards NRY24F000 Dry Vacuum Pump
This model belongs to the Edwards iXH 1220H series dry vacuum pump, which adopts a multi-stage Roots design and is positioned in harsh process scenarios such as semiconductor manufacturing that require extremely high vacuum cleanliness and reliability.
Product Features
The dry pumping structure does not require the use of oil or water as the working medium during operation, providing a clean and oil-free vacuum environment.
Multi stage Roots design, balancing high pumping speed and stable ultimate vacuum degree, suitable for high load continuous operation conditions.
By adopting variable frequency drive technology, the operating status can be automatically adjusted according to the actual process load, which helps to reduce energy consumption and usage costs.
Compact integrated design, small footprint, easy to flexibly layout in semiconductor production lines or clean room environments.
Suitable for key semiconductor manufacturing processes such as load lock, transmission cavity, etching, CVD, PVD, RTP, etc.
Fully enclosed structural design, with low operating noise and vibration levels, reducing interference with precision processes.
The water-cooled cooling system ensures the thermal stability of the pump body during high-power and long-term operation.
Standard industry standard communication interface, supporting integrated monitoring with upper computer or factory automation system.
Compliant with international safety standards such as CE certification, meeting the requirements for global equipment import, export, and installation.
This series of products is also available in the second-hand equipment market, covering refurbished versions from manufacturers and providing certain quality assurance options.
Core parameters
Model attribution: iXH 1220H series.
Part number: NRY24F000 (also available in NRY24F000XS version).
Power supply: Three phase 208V AC, 50/60Hz.
Origin and Manufacturing: Edwards (Original Manufacturing).
Summary
Edwards NRY24F000 (iXH 1220H) is a high-performance dry vacuum pump designed for the semiconductor industry's demanding processes. It is based on oil-free, clean, stable and reliable multi-stage Roots technology, and achieves a good balance between pumping speed, energy consumption and space utilization through variable frequency drive and compact design, which can meet the strict requirements of high-end manufacturing industry for the reliability and cleanliness of vacuum equipment.
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