Technologies EV-M502NSF-BE 干式真空泵 PDF资料
1.产 品 资 料 介 绍：
Ebara Technologies EV-M502NSF-BE 干式真空泵
该型号为Ebara EV-M系列干式真空泵，采用多级罗茨式设计，适用于半导体、FPD（平板显示）、光伏及科研镀膜等清洁制程领域。
产品特点
采用多级罗茨干式泵送结构，运行中无需使用油或水作为工作介质，可实现清洁无油真空环境。
内置变频驱动电机，可根据工艺负载自动调节转速，在保证抽速的同时降低能耗。
紧凑一体化设计，占地面积小，便于设备集成与现场布局。
适用于高负荷连续运行工况，具备良好的可靠性与稳定性，适合工业生产环境。
标配CE认证及对应安全规范，符合国际化设备进出口要求。
核心参数
电源规格：三相208V AC，50/60Hz。
产地：日本制造。
原厂料号：500334004。
型号对应：EV-M系列 M502N 型号。
总结
Ebara Technologies EV-M502NSF-BE是一款针对半导体及泛半导体行业清洁制程设计的干式真空泵，以多级罗茨技术与变频驱动为核心，在实现无油真空的同时兼顾了节能与紧凑性，适用于对可靠性和洁净度要求较高的连续生产场景。
Technologies EV-M502NSF-BE 干式真空泵 英文介绍
Ebara Technologies EV-M502NSF-BE Dry Vacuum Pump
This model is the Ebara EV-M series dry vacuum pump, which adopts a multi-stage Roots design and is suitable for clean process fields such as semiconductor, FPD (flat panel display), photovoltaic, and scientific coating.
Product Features
Adopting a multi-stage Roots dry pumping structure, there is no need to use oil or water as the working medium during operation, which can achieve a clean and oil-free vacuum environment.
Built in variable frequency drive motor, which can automatically adjust the speed according to the process load, reducing energy consumption while ensuring pumping speed.
Compact integrated design, small footprint, convenient for equipment integration and on-site layout.
Suitable for high load continuous operation conditions, with good reliability and stability, suitable for industrial production environments.
Standard CE certification and corresponding safety regulations, in compliance with international equipment import and export requirements.
Core parameters
Power specification: Three phase 208V AC, 50/60Hz.
Origin: Made in Japan.
Original part number: 500334004.
Model correspondence: EV-M series M502N model.
Summary
Ebara Technologies EV-M502NSF-BE is a dry vacuum pump designed for clean processes in the semiconductor and general semiconductor industries. It features multi-stage Roots technology and variable frequency drive as its core, achieving oil-free vacuum while balancing energy efficiency and compactness. It is suitable for continuous production scenarios that require high reliability and cleanliness.
Technologies EV-M502NSF-BE 干式真空泵 产品图片
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