KOKUSAI D4EX40194 控制器 PDF资料
1.产 品 资 料 介 绍:
KOKUSAI D4EX40194 是日本国际电气为其半导体制造设备配套的控制器模块,主要用于扩散炉、沉积设备等工艺系统中的温度控制。
产品特点
属于KOKUSAI半导体设备的定制化控制器板卡。
该系列包含温度控制器、加热器控制热电偶等组件。
应用于半导体扩散炉、CVD等高温工艺设备。
负责接收传感器信号并输出控制指令,调节加热器或气路阀门。
配合设备微处理器系统执行可编程工艺参数。
支持与上位机或操作终端进行数据通信与状态反馈。
采用工业级元器件,满足高可靠性要求。
模块化插卡结构,便于维护与更换。
在二手市场有供应,具备一定存量。
兼容KOKUSAI相关工艺设备的备件更换。
产品参数
产品类型:控制器模块/板卡。
适用领域:半导体扩散炉、CVD/LPCVD。
核心功能:温度控制、传感器信号处理。
通信方式:支持与主控制器及上位系统交互。
兼容设备:KOKUSAI系列半导体工艺设备。
结尾
KOKUSAI D4EX40194 是半导体设备专用控制器模块,主要用于温度控制,适用于设备维护与备件更换。选型前请结合具体设备确认兼容性。
KOKUSAI D4EX40194 is a controller module provided by Nippon International Electric for its semiconductor manufacturing equipment, mainly used for temperature control in process systems such as diffusion furnaces and deposition equipment.
Product Features
Customized controller board belonging to KOKUSAI semiconductor equipment.
This series includes components such as temperature controllers, heater control thermocouples, etc.
Applied to high-temperature process equipment such as semiconductor diffusion furnaces and CVD.
Responsible for receiving sensor signals and outputting control commands, adjusting heaters or air circuit valves.
Cooperate with the device microprocessor system to execute programmable process parameters.
Support data communication and status feedback with the upper computer or operating terminal.
Using industrial grade components to meet high reliability requirements.
Modular card insertion structure, easy to maintain and replace.
There is supply in the second-hand market with a certain stock.
Replacement of spare parts compatible with KOKUSAI related process equipment.
Product Parameters
Product type: Controller module/board.
Applicable fields: semiconductor diffusion furnace CVD/LPCVD。
Core functions: temperature control, sensor signal processing.
Communication method: Supports interaction with the main controller and upper system.
Compatible equipment: KOKUSAI series semiconductor process equipment.
ending
KOKUSAI D4EX40194 is a dedicated controller module for semiconductor equipment, mainly used for temperature control and suitable for equipment maintenance and spare parts replacement. Please confirm compatibility with specific equipment before selecting.

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