TEL 3D81-000099-V1 控制器模块 PDF资料
1.产 品 资 料 介 绍：
TEL 3D81-000099-V1 是东京电子为其半导体设备定制开发的控制主板卡件，作为设备控制系统中的核心主控单元，协调各子系统运行。
产品特点
功能定位为主控单元，负责系统运行协调。
应用于刻蚀、CVD/PVD薄膜沉积、扩散炉及清洗系统。
运行嵌入式控制逻辑，精确执行温度、流量、阀门、机械臂控制。
与I/O卡件、传感器、执行器及上位控制系统进行数据通信。
实时采集运行状态数据，判断异常并输出报警。
配合图形化界面实现操作指令响应与参数调节。
定制化设计，适配TEL设备安装与接口规范。
采用工业级元器件，满足高可靠性要求。
模块化卡件结构，便于维护与更换。
在二手市场有供应，表明具有一定存量。
产品参数
产品类型：控制主板卡件/主控单元。
适用领域：半导体工艺设备。
通信接口：I/O模块、传感器、执行器、上位控制系统。
核心功能：逻辑执行、子系统协调、状态监测。
兼容设备：TEL刻蚀、薄膜沉积、扩散、清洗设备。
结尾
TEL 3D81-000099-V1 是半导体设备核心控制主板，以高集成度和定制化设计满足严苛工艺控制需求
TEL 3D81-000099-V1 is a control motherboard card customized and developed by Tokyo Electronics for its semiconductor equipment. As the core control unit in the equipment control system, it coordinates the operation of various subsystems.
Product Features
Functional positioning as the main control unit, responsible for system operation coordination.
Applied to etching, CVD/PVD film deposition, diffusion furnaces, and cleaning systems.
Run embedded control logic to accurately execute temperature, flow, valve, and robotic arm control.
Communicate data with I/O cards, sensors, actuators, and upper control systems.
Real time collection of operational status data, identification of anomalies, and output of alarms.
Implement operation command response and parameter adjustment in conjunction with a graphical interface.
Customized design, adapted to TEL equipment installation and interface specifications.
Using industrial grade components to meet high reliability requirements.
Modular card structure for easy maintenance and replacement.
There is supply in the second-hand market, indicating a certain stock.
Product Parameters
Product type: Control motherboard card/main control unit.
Applicable field: Semiconductor process equipment.
Communication interfaces: I/O modules, sensors, actuators, and upper control systems.
Core functions: logic execution, subsystem coordination, status monitoring.
Compatible devices: TEL etching, thin film deposition, diffusion, cleaning equipment.
ending
TEL 3D81-000099-V1 is a core control motherboard for semiconductor equipment, which meets strict process control requirements with high integration and customized design
3.其他产品
BENTLY 3500-25-01-01-00 输入模块
CMA198 输入输出模块
BENTLY 3500/25 149369-01 双通道模块
4.其他产品
FM9925a-E HIEE451116R0001 Input module
GD9924BE V2 HIEE401091R0002 module
HIER464920P0001 Output module
| PMB31B-10101-02 | INIIT12 | 57160001-UH DSTD 150 |
| PMB31B-10101-01 | 07TI80 | PFRL 101C |
| PMB31B-10101-00 | NTMU02 | P21NSXS-LSS-NS-06 |
| PMB31B-10100-03 | 70 EA 04a-E | 57160001-PK DSDI 125 |
| PMB31B-10100-02 | 70 BA 01b | M22NSXB-IDS-NS-02 |
| PMB31B-10100-01 | AMAT 0100-00015 | N41HRFL-LNK-NS-00 |
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