MKS 683B-29016 节流控制阀 PDF资料
1.产 品 资 料 介 绍：
MKS 683B-29016 是MKS Instruments推出的一款智能型排气节流控制阀，用于真空系统中对工艺腔体压力进行精确闭环控制，适用于半导体刻蚀、薄膜沉积等高精度场景。
产品特点
集成了控制、通信和驱动电路，无需单独控制器。
内置第二代PID控制算法，响应快速且超调小。
支持DeviceNet数字通信协议，抗干扰能力强。
采用直驱齿轮传动，无皮带磨损，寿命更长。
阀体为316L不锈钢材质，耐腐蚀性好。
支持压力控制和阀板位置控制两种操作模式。
兼容MKS电容式压力计及0-10 VDC模拟压力信号。
内置两个可编程报警继电器，用于安全联锁。
具备可调软启动功能，减少压力突变引起的湍流。
全行程开关时间约1.7秒，响应迅速。
产品参数
阀门类型：蝶阀（排气节流控制）。
通信接口：DeviceNet。
阀体材质：316L不锈钢，Viton密封。
工作温度：阀体0~100°C，电机-20~40°C。
分辨率：1/12,000，定位精度高。
结尾
MKS 683B-29016 是一款高集成度的智能排气节流阀，以快速响应、高精度控制为核心优势，适用于对压力稳定性要求极高的半导体及工业真空工艺
MKS 683B-29016 节流控制阀 英文介绍
MKS 683B-29016 is an intelligent exhaust throttle control valve launched by MKS Instruments, used for precise closed-loop control of process chamber pressure in vacuum systems, suitable for high-precision scenarios such as semiconductor etching and thin film deposition.
Product Features
Integrated control, communication, and drive circuits, eliminating the need for a separate controller.
Built in second-generation PID control algorithm, with fast response and minimal overshoot.
Supports DeviceNet digital communication protocol and has strong anti-interference ability.
Adopting direct drive gear transmission, there is no belt wear and longer service life.
The valve body is made of 316L stainless steel material, which has good corrosion resistance.
Supports two operating modes: pressure control and valve plate position control.
Compatible with MKS capacitive pressure gauges and 0-10 VDC analog pressure signals.
Built in two programmable alarm relays for safety interlocking.
Equipped with adjustable soft start function to reduce turbulence caused by sudden pressure changes.
The full travel switch time is about 1.7 seconds, and the response is fast.
Product Parameters
Valve type: Butterfly valve (exhaust throttling control).
Communication interface: DeviceNet.
Valve body material: 316L stainless steel, Viton seal.
Working temperature: valve body 0~100 ° C, motor -20~40 ° C.
Resolution: 1/12000, high positioning accuracy.
ending
MKS 683B-29016 is a highly integrated intelligent exhaust throttle valve, with fast response and high-precision control as its core advantages, suitable for semiconductor and industrial vacuum processes that require extremely high pressure stability
MKS 683B-29016 节流控制阀 产品图片
3.其他产品
AB 1756-L62 处理器单元
AB 1769-L32E 模拟量模块
BENTLY 3500-25-01-01-00 输入模块
4.其他产品
DT602 GJR2911200R1 Switch module
FM9925a-E HIEE451116R0001 Input module
GD9924BE V2 HIEE401091R0002 module
| PMB31B-10116-00 | BE1101 | N31HRHK-LEK-SS-02 |
| PMB31B-10114-03 | AMAT 0100-76014 | PFTL301E |
| PMB31B-10114-02 | IPBLK01 | PFVL141V |
| PMB31B-10114-01 | PHBRMU1000N100 | 3BSE003816R1 SC520 |
| PMB31B-10114-00 | AMAT 0100-00546 | N31HRFK-LNK-NS-00 |
| PMB31B-10101-03 | NMPC01 | M22NRXC-LDN-NS-00 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
