MKS 1179A21CR1BV 质量流量控制器 PDF资料
1.产 品 资 料 介 绍：
MKS 1179A21CR1BV 是MKS Instruments旗下1179A系列的一款弹性密封质量流量控制器，用于精确测量与控制气体流量。
产品特点
采用弹性密封结构，属于该系列通用型产品。
基于热学原理测量，重复性高。
精度为全量程±1.0%，灵敏度为全量程0.1%。
控制量程为全量程2%~100%。
热机时间小于2分钟，响应速度小于2秒。
标准3英寸底座，可直接替换同类产品。
支持模拟与数字两种控制模式。
模拟接口可选9/15/20针D型连接器。
数字接口支持RS485、DeviceNet或Profibus。
阀体及接液部件为316不锈钢材质，耐腐蚀性好。
产品参数
全量程：10SCCM~20000SCCM可选（由后缀确定）。
精度：±1.0%全量程。
输入电压：±15 VDC @ 100mA。
输出信号：0~5 VDC（模拟模式）。
最大入口压力：150 psig。
结尾
MKS 1179A21CR1BV 是一款高精度、快速响应的质量流量控制器，安装兼容性好，适用于对气体流量重复性要求较高的场景
MKS 1179A21CR1BV is an elastic sealed mass flow controller under the MKS Instruments 1179A series, used for precise measurement and control of gas flow.
Product Features
Adopting an elastic sealing structure, it belongs to the universal product series.
Measurement based on thermal principles, with high repeatability.
The accuracy is ± 1.0% of the full range, and the sensitivity is 0.1% of the full range.
The control range is 2% to 100% of the full range.
The heating time is less than 2 minutes and the response speed is less than 2 seconds.
Standard 3-inch base, can be directly replaced with similar products.
Supports both analog and digital control modes.
The analog interface can be equipped with 9/15/20 pin D-type connectors.
The digital interface supports RS485, DeviceNet, or Profibus.
The valve body and liquid receiving components are made of 316 stainless steel, which has good corrosion resistance.
Product Parameters
Full range: 10SCCM~20000SCCM optional (determined by suffix).
Accuracy: ± 1.0% full range.
Input voltage: ± 15 VDC @ 100mA.
Output signal: 0~5 VDC (analog mode).
Maximum inlet pressure: 150 PSI.
ending
MKS 1179A21CR1BV is a high-precision, fast response mass flow controller with good installation compatibility, suitable for scenarios with high requirements for gas flow repeatability
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